Abstract: In an overlay measurement method, an overlay mark having programmed overlay values is provided. The overlay mark is scanned with an electron beam to obtain a voltage contrast image. A defect function that changes according to the overlay value is obtained from voltage contrast image data. Self-cross correlation is performed on the defect function to determine an overlay.

Abstract: The sensor detects a proximity situation and applied external force in the same installation area while minimizing elements and boards included in a sensor. A proximity and tactile sensor 10 includes a body unit 11 to be attached to a detection target portion and a detection unit 12 configured to obtain approaching distance of an object to the body unit 11 and magnitude of external force. The body unit 11 includes an electrode 14 formed by a rigid body with conductivity, a magnetic body 15 integrally attached to the electrode 14, a foam 16 disposed outside the electrode 14 and magnetic body 15 and composed of an elastic body, and a magnetic sensor 17 configured to detect change in magnetic field from the magnetic body 15. The detection unit 12 includes a proximity sensing unit 22 and an external force sensing unit 23.