Patents by Inventor Jintack YU

Jintack YU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of cleaning an apparatus that processes a substrate
    Patent number: 11823915
    Abstract: Provided is an apparatus for processing a substrate including a spin head on which a substrate is placed, a container provided to surround the spin head, an upper nozzle member supplying a processing solution downwards, a bottom cleaning member located to be a certain distance from the bottom of the spin head, wherein the bottom cleaning member sprays a cleaning solution to the bottom of the spin head.
    Type: Grant
    Filed: November 19, 2020
    Date of Patent: November 21, 2023
    Assignee: Semes Co., Ltd.
    Inventors: Jintack Yu, Jaemyoung Lee
  • APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF CLEANING SAME
    Publication number: 20210074557
    Abstract: Provided is an apparatus for processing a substrate including a spin head on which a substrate is placed, a container provided to surround the spin head, an upper nozzle member supplying a processing solution downwards, a bottom cleaning member located to be a certain distance from the bottom of the spin head, wherein the bottom cleaning member sprays a cleaning solution to the bottom of the spin head.
    Type: Application
    Filed: November 19, 2020
    Publication date: March 11, 2021
    Applicant: SEMES CO., LTD.
    Inventors: Jintack YU, Jaemyoung LEE
  • APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF CLEANING SAME
    Publication number: 20170338132
    Abstract: Provided is an apparatus for processing a substrate including a spin head on which a substrate is placed, a container provided to surround the spin head, an upper nozzle member supplying a processing solution downwards, a bottom cleaning member located to be a certain distance from the bottom of the spin head, wherein the bottom cleaning member sprays a cleaning solution to the bottom of the spin head.
    Type: Application
    Filed: August 8, 2017
    Publication date: November 23, 2017
    Applicant: SEMES CO., LTD.
    Inventors: Jintack YU, Jaemyoung LEE
  • APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF CLEANING SAME
    Publication number: 20150059808
    Abstract: Provided is an apparatus for processing a substrate including a spin head on which a substrate is placed, a container provided to surround the spin head, an upper nozzle member supplying a processing solution downwards, a bottom cleaning member located to be a certain distance from the bottom of the spin head, wherein the bottom cleaning member sprays a cleaning solution to the bottom of the spin head.
    Type: Application
    Filed: August 29, 2014
    Publication date: March 5, 2015
    Inventors: Jintack YU, Jae-Myoung LEE