Abstract: A method for forming a semiconductor die, includes forming an interlayer dielectric layer on a substrate having a semiconductor die region, a seal-ring region, and a scribe line region, forming a metal pad and a test pad on the interlayer dielectric layer, forming a passivation dielectric layer on the interlayer dielectric layer, the metal pad, and the test pad, first etching the passivation dielectric layer and the interlayer dielectric layer existing between the seal-ring region and the scribe line region to a predetermined depth using a plasma etching process, second etching the passivation dielectric layer to expose the metal pad and the test pad, forming a bump on the metal pad, and dicing the substrate while removing the scribe line region by mechanical sawing.

Abstract: An electrostatic precipitating apparatus for an air conditioning system is disclosed. The precipitating apparatus includes an electrostatic precipitator including a plurality of discharge electrodes to which a voltage is applied and a plurality of electrostatic precipitating electrodes each disposed between the discharge electrodes and grounded, a washing water supply spraying the washing water to the electrostatic precipitator, and a frame assembly fixed to the duct to support the electrostatic precipitator. The frame assembly is fixed to the duct to support the electrostatic precipitator, and includes a prestressing locking member fixed to inside of the duct in a state in which a pressing force is applied to the electrostatic precipitator.

Abstract: Disclosed herein is an electrostatic precipitation method using an electrostatic precipitator including a collection module having a collection electrode and a discharge electrode, a housing having an internal partition wall formed therein, an inlet-side passage switching member, and an outlet-side passage switching member. The electrostatic precipitation method includes collecting dust by applying a voltage to the discharge electrode while gas flows, closing some of the flow spaces, divided by the internal partition wall using the passage switching members, and performing dust collection for one of the opened flow spaces by applying a voltage to the discharge electrode therein, and performing washing for at least one of the closed flow spaces by supplying washing water to the collection electrode therein.

Abstract: An electrostatic precipitating apparatus for a cooling tower is provided. The precipitating apparatus include an electrostatic precipitator including a plurality of discharge electrodes to which a voltage is applied and a plurality of electrostatic precipitating electrodes each disposed between the discharge electrodes and grounded, a washing water supply spraying the washing water to the electrostatic precipitator, and a frame assembly supporting the electrostatic precipitator. The electrostatic precipitator includes a first setting beam having a plurality of lower slots into which the discharge electrodes are fixedly inserted, and the frame assembly includes a lower frame extending in a stacking direction of the discharge electrodes to support the first setting beam, via which a voltage is applied to the discharge electrode.

Abstract: Disclosed herein is a dust collecting tower apparatus that includes a housing having an inlet, into which gas is introduced, and an outlet from which the gas is discharged, and a collection module disposed in the housing and configured to collect particulates with a corona discharge. The collection module includes a plurality of discharge electrodes, to which a voltage is applied, a plurality of collection electrodes disposed between the respective discharge electrodes, where the collection electrodes is grounded, and a first setting beam having a plurality of lower slots into which the discharge electrodes are inserted. The apparatus further includes a washing water feeder configured to spray washing water to the collection module.

Abstract: Disclosed herein is an electrostatic precipitator apparatus that includes a housing having an inlet, into which gas is introduced, and an outlet from which the gas is discharged, and a collection module installed in the housing. The collection module includes a plurality of discharge electrodes, to which a voltage is applied, and a plurality of collection electrodes grounded and disposed between the discharge electrodes. The apparatus further comprises a washing water feeder to spray washing water to the collection module, and a washing water treatment device disposed beneath the collection module to accommodate the washing water dropped from the collection module.

Abstract: Disclosed herein is a dust collecting tower apparatus that includes a housing having an inlet, into which gas is introduced, and an outlet from which the gas is discharged, and a collection module disposed in the housing and configured to collect particulates with a corona discharge. The collection module includes a plurality of discharge electrodes, to which a voltage is applied, a plurality of collection electrodes disposed between the respective discharge electrodes, where the collection electrodes is grounded, and a first setting beam having a plurality of lower slots into which the discharge electrodes are inserted. The apparatus further includes a washing water feeder configured to spray washing water to the collection module.

Abstract: Disclosed herein is an electrostatic precipitation method using an electrostatic precipitator including a collection module having a collection electrode and a discharge electrode, a housing having an internal partition wall formed therein, an inlet-side passage switching member, and an outlet-side passage switching member. The electrostatic precipitation method includes collecting dust by applying a voltage to the discharge electrode while gas flows, closing some of the flow spaces, divided by the internal partition wall using the passage switching members, and performing dust collection for one of the opened flow spaces by applying a voltage to the discharge electrode therein, and performing washing for at least one of the closed flow spaces by supplying washing water to the collection electrode therein.

Abstract: An electrostatic precipitating apparatus for a cooling tower is provided. The precipitating apparatus include an electrostatic precipitator including a plurality of discharge electrodes to which a voltage is applied and a plurality of electrostatic precipitating electrodes each disposed between the discharge electrodes and grounded, a washing water supply spraying the washing water to the electrostatic precipitator, and a frame assembly supporting the electrostatic precipitator. The electrostatic precipitator includes a first setting beam having a plurality of lower slots into which the discharge electrodes are fixedly inserted, and the frame assembly includes a lower frame extending in a stacking direction of the discharge electrodes to support the first setting beam, via which a voltage is applied to the discharge electrode.

Abstract: An electrostatic precipitating apparatus for an air conditioning system is disclosed. The precipitating apparatus includes an electrostatic precipitator including a plurality of discharge electrodes to which a voltage is applied and a plurality of electrostatic precipitating electrodes each disposed between the discharge electrodes and grounded, a washing water supply spraying the washing water to the electrostatic precipitator, and a frame assembly fixed to the duct to support the electrostatic precipitator. The frame assembly is fixed to the duct to support the electrostatic precipitator, and includes a prestressing locking member fixed to inside of the duct in a state in which a pressing force is applied to the electrostatic precipitator.

Abstract: Disclosed herein is an electrostatic precipitator apparatus that includes a housing having an inlet, into which gas is introduced, and an outlet from which the gas is discharged, and a collection module installed in the housing. The collection module includes a plurality of discharge electrodes, to which a voltage is applied, and a plurality of collection electrodes grounded and disposed between the discharge electrodes. The apparatus further comprises a washing water feeder to spray washing water to the collection module, and a washing water treatment device disposed beneath the collection module to accommodate the washing water dropped from the collection module.

Abstract: A heat exchanger unit includes tube units arranged within a duct unit for heat exchange with combustion gas supplied from a furnace of a thermal power plant, and heat exchanger fins longitudinally formed on outer peripheral surfaces of the tube units and having different thickness and sizes while heat exchange with the combustion gas is performed through the heat exchanger fin.

Abstract: A heat exchanger unit includes tube units arranged within a duct unit for heat exchange with combustion gas supplied from a furnace of a thermal power plant, and heat exchanger fins longitudinally formed on outer peripheral surfaces of the tube units and having different thickness and sizes while heat exchange with the combustion gas is performed through the heat exchanger fin.