Patents by Inventor Jiong Cheng

Jiong Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implantation control using charge collection, optical emission spectroscopy and mass analysis
    Patent number: 6101971
    Abstract: Apparatus and method for implanting ions into a workpiece surface. A concentration of ions is produced. An optical analysis of the concentration of ions is performed and recorded. The constituency of the ion concentration is determined by comparing the optical analysis data with a database of records on a storage medium wherein the optical analysis data for given concentrations of ions have been stored for subsequent access. Ions from the ion concentration are caused to impact a workpiece surface. The dose of ions implanted into the workpiece is measured. Implantation of the workpiece is stopped once an appropriate dose has been reached.
    Type: Grant
    Filed: December 22, 1998
    Date of Patent: August 15, 2000
    Assignee: Axcelis Technologies, Inc.
    Inventors: A. Stuart Denholm, Jiong Cheng, Michael A. Graf, Peter Kellerman, George Stejic