Abstract: An apparatus and method are provided for improved utilization of a sputter target in the longitudinal end regions. The focus of erosion in the end regions is widened, thereby extending the useful life of the target. This provides improved efficiency and reduces waste because a greater proportion of the target material in the more expansive central region can be harvested, because the target is utilized for a longer period of time.

Abstract: An apparatus and method are provided for improved utilization of a sputter target in the longitudinal end regions. The focus of erosion in the end regions is widened, thereby extending the useful life of the target. This provides improved efficiency and reduces waste because a greater proportion of the target material in the more expansive central region can be harvested, because the target is utilized for a longer period of time.

Abstract: The servomotor which can be used for a valve uses a worm-type transmission to drive the nut used to move the adjusting spindle. The transmission includes a worm wheel secured to the nut via a ring and a worm gear meshing with the worm wheel and driven off a drive motor. The worm wheel is fixed to the ring and the ring keyed to the nut in a slot so that the nut can move axially of the wheel when the spindle reaches an end position. The pick-off for a position transmitter includes an external thread on the nut which has the same pitch as the nut on the spindle.