Patents by Inventor Jiri Zbranek

Jiri Zbranek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automated ion beam idle
    Patent number: 9123500
    Abstract: An improved method and apparatus for shutting down and restoring an ion beam in an ion beam system. Preferred embodiments provide a system for improved power control of a focused ion beam source, which utilizes an automatic detection of when a charged particle beam system is idle (the beam itself is not in use) and then automatically reducing the beam current to a degree where little or no ion milling occurs at any aperture plane in the ion column. Preferred embodiments include a controller operable to modify voltage to an extractor electrode and/or to reduce voltage to a source electrode when idle state of an ion source of the charged particle beam system is detected.
    Type: Grant
    Filed: March 31, 2012
    Date of Patent: September 1, 2015
    Assignee: FEI COMPANY
    Inventors: Tom Miller, Sean Kellogg, Jiri Zbranek
  • Automated Ion Beam Idle
    Publication number: 20130256553
    Abstract: An improved method and apparatus for shutting down and restoring an ion beam in an ion beam system. Preferred embodiments provide a system for improved power control of a focused ion beam source, which utilizes an automatic detection of when a charged particle beam system is idle (the beam itself is not in use) and then automatically reducing the beam current to a degree where little or no ion milling occurs at any aperture plane in the ion column. Preferred embodiments include a controller operable to modify voltage to an extractor electrode and/or to reduce voltage to a source electrode when idle state of an ion source of the charged particle beam system is detected.
    Type: Application
    Filed: March 31, 2012
    Publication date: October 3, 2013
    Applicant: FEI Company
    Inventors: Tom Miller, Sean Kellogg, Jiri Zbranek