Patents by Inventor Jirou Nukaga

Jirou Nukaga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Label sheet for cleaning and conveying member having cleaning function
    Patent number: 9131829
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Grant
    Filed: June 30, 2014
    Date of Patent: September 15, 2015
    Assignee: NITTO DENKO CORPORATION
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda
  • LABEL SHEET FOR CLEANING AND CONVEYING MEMBER HAVING CLEANING FUNCTION
    Publication number: 20140311666
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Application
    Filed: June 30, 2014
    Publication date: October 23, 2014
    Applicant: NITTO DENKO CORPORATION
    Inventors: Makoto NAMIKAWA, Yoshio TERADA, Jirou NUKAGA, Eiji TOYODA
  • LABEL SHEET FOR CLEANING AND CONVEYING MEMBER HAVING CLEANING FUNCTION
    Publication number: 20140311525
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Application
    Filed: June 30, 2014
    Publication date: October 23, 2014
    Applicant: NITTO DENKO CORPORATION
    Inventors: Makoto NAMIKAWA, Yoshio TERADA, Jirou NUKAGA, Eiji TOYODA
  • Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these
    Patent number: 8460783
    Abstract: A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.
    Type: Grant
    Filed: March 10, 2008
    Date of Patent: June 11, 2013
    Assignee: Nitto Denko Corporation
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga
  • LABEL SHEET FOR CLEANING AND CONVEYING MEMBER HAVING CLEANING FUNCTION
    Publication number: 20110229697
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Application
    Filed: May 27, 2011
    Publication date: September 22, 2011
    Applicant: NITTO DENKO CORPORATION
    Inventors: Makoto NAMIKAWA, Yoshio TERADA, Jirou NUKAGA, Eiji TOYODA
  • LABEL SHEET FOR CLEANING AND CONVEYING MEMBER HAVING CLEANING FUNCTION
    Publication number: 20110229675
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Application
    Filed: May 27, 2011
    Publication date: September 22, 2011
    Applicant: NITTO DENKO CORPORATION
    Inventors: Makoto NAMIKAWA, Yoshio TERADA, Jirou NUKAGA, Eiji TOYODA
  • CLEANING SHEET, CONVEYING MEMBER USING THE SAME, AND SUBSTRATE PROCESSING EQUIPMENT CLEANING METHOD USING THEM
    Publication number: 20100319151
    Abstract: A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
    Type: Application
    Filed: August 6, 2010
    Publication date: December 23, 2010
    Applicant: NITTO DENKKO CORPORATION
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda, Hirofumi Fujii, Daisuke Uenda, Asami Funatsu, Nobuaki Maruoka, Hitoshi Ishizaka, Yasuhiro Amano
  • Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
    Patent number: 7793668
    Abstract: A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: September 14, 2010
    Assignee: Nitto Denko Corporation
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda, Hirofumi Fujii, Daisuke Uenda, Asami Funatsu, Nobuaki Maruoka, Hitoshi Ishizaka, Yasuhiro Amano
  • Cleaning sheet and its production method as well as transporting member having such cleaning sheet
    Patent number: 7712177
    Abstract: To provide a cleaning sheet that can remove foreign matter adhering on a probe needle without wearing the probe needle and that does not allow the foreign matter to re-adhere on the probe needle, the cleaning sheet has a cleaning layer on at least one surface thereof, the cleaning layer containing a urethane polymer and a vinyl monomer.
    Type: Grant
    Filed: March 18, 2004
    Date of Patent: May 11, 2010
    Assignee: Nitto Denko Corporation
    Inventors: Yoshinori Yoshida, Yohei Maeno, Jirou Nukaga
  • Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
    Patent number: 7713356
    Abstract: A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10.
    Type: Grant
    Filed: May 8, 2001
    Date of Patent: May 11, 2010
    Assignee: Nitto Denko Corporation
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda
  • CLEANING SHEETS, TRANSFER MEMBER HAVING CLEANING FUNCTION, AND METHOD OF CLEANING SUBSTRATE-PROCESSING APPARATUS WITH THESE
    Publication number: 20080173329
    Abstract: A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.
    Type: Application
    Filed: March 10, 2008
    Publication date: July 24, 2008
    Inventors: Makoto NAMIKAWA, Yoshio Terada, Jirou Nukaga
  • Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these
    Publication number: 20070104939
    Abstract: A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.
    Type: Application
    Filed: December 22, 2006
    Publication date: May 10, 2007
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga
  • Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
    Publication number: 20060105164
    Abstract: A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
    Type: Application
    Filed: September 20, 2005
    Publication date: May 18, 2006
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda, Hirofumi Fujii, Daisuke Uenda, Asami Funatsu, Nobuaki Maruoka, Hitoshi Ishizaka, Yasuhiro Amano
  • Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
    Publication number: 20050244632
    Abstract: A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.
    Type: Application
    Filed: December 20, 2004
    Publication date: November 3, 2005
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda, Hirofumi Fujii, Daisuke Uenda, Asami Funatsu, Nobuaki Maruoka, Hitoshi Ishizaka, Yasuhiro Amano
  • Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these
    Publication number: 20050118414
    Abstract: A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.
    Type: Application
    Filed: December 1, 2004
    Publication date: June 2, 2005
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga
  • Cleaning sheet and its production method as well as transporting member having such cleaning sheet
    Publication number: 20040182418
    Abstract: To provide a cleaning sheet that can remove foreign matter adhering on a probe needle without wearing the probe needle and that does not allow the foreign matter to re-adhere on the probe needle, the cleaning sheet has a cleaning layer on at least one surface thereof, the cleaning layer containing a urethane polymer and a vinyl monomer.
    Type: Application
    Filed: March 18, 2004
    Publication date: September 23, 2004
    Applicant: NITTO DENKO CORPORATION
    Inventors: Yoshinori Yoshida, Yohei Maeno, Jirou Nukaga
  • Label sheet for cleaning and conveying member having cleaning function
    Publication number: 20040007252
    Abstract: A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.
    Type: Application
    Filed: December 3, 2002
    Publication date: January 15, 2004
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda
  • Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
    Publication number: 20030136430
    Abstract: A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mm2 as determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10.
    Type: Application
    Filed: December 3, 2002
    Publication date: July 24, 2003
    Inventors: Makoto Namikawa, Yoshio Terada, Jirou Nukaga, Eiji Toyoda