Patents by Inventor Ji-Shen Yang

Ji-Shen Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer edge detector
    Patent number: 6934661
    Abstract: A method for detecting wafer flat shift, and an apparatus (500) having two sensors (506a) and (506b) in a power supply circuit (600) for wafer fabrication equipment, the sensors (506a) and (506b) detecting a shift in wafer flat position from a desired position and shutting off the wafer fabrication equipment.
    Type: Grant
    Filed: December 16, 2003
    Date of Patent: August 23, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jean-Hua Yuen, Po-Ming Chen, Ming-Ji Chiang, Ji-Shen Yang
  • WAFER EDGE DETECTOR
    Publication number: 20050140977
    Abstract: A method for detecting wafer flat shift, and an apparatus (500) having two sensors (506a) and (506b) in a power supply circuit (600) for wafer fabrication equipment, the sensors (506a) and (506b) detecting a shift in wafer flat position from a desired position and shutting off the wafer fabrication equipment.
    Type: Application
    Filed: December 16, 2003
    Publication date: June 30, 2005
    Inventors: Jean-Hua Yuen, Po-Ming Chen, Ming-Ji Chiang, Ji-Shen Yang