Abstract: In a SECS-to-XML message converting method and apparatus, SECS messages transacted in a semiconductor equipment system are parsed into sets of SECS items that are subsequently coded. Coded SECS items of the SECS messages from a semiconductor equipment are paired with the coded SECS items of the SECS messages from a tool control unit and corresponding to preset items of interest SECS items corresponding to the preset items of interest according to the dependency thereof. The paired coded SECS items are then converted into XML messages.