Patents by Inventor Jiuning HU

Jiuning HU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEMS, PRODUCTS, AND METHODS FOR GENERATING PATTERNING DEVICES AND PATTERNS THEREFOR
    Publication number: 20230185183
    Abstract: A method for improving a design of a patterning device. The method includes (i) obtaining mask points of a design of a mask feature, wherein the mask feature corresponds to a target feature in a target pattern to be printed on a substrate; and (ii) adjusting locations of the mask points to generate a modified design of the mask feature based on the adjusted mask points.
    Type: Application
    Filed: May 7, 2021
    Publication date: June 15, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Jiuning HU, Jun YE, Yen-Wen LU