Abstract: An air suspension support and motion guiding device having unequal-depth throttling chambers. Throttling plugs (10) are arranged regularly on an air suspension working surface, forming an array of throttling chambers with unequal depths. The invention improves the rotational stiffness per unit area for an air suspension working surface while ensuring support and stability of an air-suspended rail (1) and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Abstract: A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Abstract: A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Abstract: An air suspension support and motion guiding device having unequal-depth throttling chambers. Throttling plugs (10) are arranged regularly on an air suspension working surface, forming an array of throttling chambers with unequal depths. The invention improves the rotational stiffness per unit area for an air suspension working surface while ensuring support and stability of an air-suspended rail (1) and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Abstract: A fabrication method of a multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part based on the capillary self-assembly technique, wherein the diameter of the fiber (6) inscribed with FBG is reduced using a mechanical method or an etch method by the hydrofluoric acid; the fibers (6) inscribed with FBG, whose diameter has been reduced, are inserted into a tube (7) through its terminal with an inner taper angle; the FBG terminals of these fibers (6) are immersed into the UV adhesive (10) of a low viscosity and the UV adhesive (10) is raised in the gaps between the fibers (6); or the UV adhesive is dropped on these fibers (6) and the capillary bridge between the fibers (6) is formed; a most compact structure of the fiber bundle is formed as a result of the capillary self-assembly; the fiber bundle is cured using a UV light and the multi-core FBG (11) is therefore formed; the terminal of the multi-core FBG (11) is polished with an optic fiber polishing machine and then a spherical tip i

Abstract: A method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core fiber Bragg grating probe are provided, wherein a multi-core FBG probe with FBGs (12,29) inscribed in the core or cores out of the center of the multi-core fiber is used to transform the two-dimensional or three-dimensional contact displacement into the spectrum shifts with a high sensitivity. At the meantime, the FBGs in the multi-core FBG probe (12,29) work as the wavelength selection device of the fiber laser, the wavelength of the fiber laser will change thereby. So the contact displacement is finally converted into the wavelength change of the fiber laser. The method and equipment have the advantage of high sensitivity, low probing force, compact structure, high inspecting aspect ratio and immunity to environment interference.

Abstract: A method and equipment based on multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into spectrum shifts of the multi-core FBG probe, and to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the multi-core FBG probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.

Abstract: A method and equipment for dimensional measurement of a micro part based on fiber laser with multi-core fiber Bragg grating probe are provided, wherein a multi-core FBG probe with FBGs (12,29) inscribed in the core or cores out of the center of the multi-core fiber is used to transform the two-dimensional or three-dimensional contact displacement into the spectrum shifts with a high sensitivity. At the meantime, the FBGs in the multi-core FBG probe (12,29) work as the wavelength selection device of the fiber laser, the wavelength of the fiber laser will change thereby. So the contact displacement is finally converted into the wavelength change of the fiber laser. The method and equipment have the advantage of high sensitivity, low probing force, compact structure, high inspecting aspect ratio and immunity to environment interference.

Abstract: A fabrication method of the multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part based on the capillary self-assembly technique, wherein the diameter of the fiber (6) inscribed with FBG is reduced using a mechanical method or an etch method by the hydrofluoric acid; the fibers (6) inscribed with FBG, whose diameter has been reduced, are inserted into a tube (7) through its terminal with an inner taper angle; the FBG terminals of these fibers (6) are immersed into the UV adhesive (10) of a low viscosity and the UV adhesive (10) is raised in the gaps between the fibers (6); or the UV adhesive is dropped on the these fibers (6) and the capillary bridge between the fibers (6) is formed; a most compact structure of the fiber bundle is formed as a result of the capillary self-assembly; the fiber bundle is cured using a UV light and the multi-core FBG (11) is therefore formed; the terminal of the multi-core FBG (11) is polished with an optic fiber polishing machine and then a spherical

Abstract: A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.

Abstract: A method and equipment based on multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into spectrum shifts of the multi-core FBG probe, and to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the multi-core FBG probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.

Abstract: A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.

Abstract: This invention relates to a beam steering mechanism with ultrahigh frequency response and high sensitivity, which is based on the translation of two mirrors. Beam steering is achieved by the translations of two mirrors in the X axial mirror group and Y axial mirror group. The two translation mirrors are located at the output ends of two PZT actuators, and are directly actuated by the two PZT actuators. The dynamic characteristics of the two translation mirrors are always exactly the same as the output characteristics of the PZT actuators. There is no mechanical translation loss in this beam steering mechanism, and so, the beam steering mechanism has an ultrahigh frequency response and high angular deflection sensitivity.

Abstract: A non-contact three-dimensional probing system based on a spherical capacitive plate has a probe including a spherical probing head (5), a stylus pipe (6), an active shielding pipe (8), a signal conducting rod (7), an insulating element (9), a stylus holder (10) and a probe body (11). The spherical probing head (5) is mounted at one end of the insulating element (9), and it has a spherical capacitive plate over its surface. The capacitive signal coming from the spherical capacitive plate is outputted through the signal conducting rod (7). The active shielding pipe (8) is driven by the signal converting and processing circuit (13) of the probing system to maintain equipotential with the signal conducting rod (7), and so the influence of parasitic capacitance and spatial electromagnetic interference can be eliminated.

Abstract: This invention relates to a beam steering mechanism with ultrahigh frequency response and high sensitivity, which is based on the translation of two mirrors. Beam steering is achieved by the translations of two mirrors in the X axial mirror group and Y axial mirror group. The two translation mirrors are located at the output ends of two PZT actuators, and are directly actuated by the two PZT actuators. The dynamic characteristics of the two translation mirrors are always exactly the same as the output characteristics of the PZT actuators. There is no mechanical translation loss in this beam steering mechanism, and so, the beam steering mechanism has an ultrahigh frequency response and high angular deflection sensitivity.

Abstract: Photoelectric autocollimation methods and apparatuses based on beam drift compensation are provided. The methods and apparatuses can be used to achieve a high autocollimation angle measurement accuracy. The apparatuses includes an autocollimator, a measurement mirror (12a), a beam drift monitoring and separating unit, a beam steering device (8), and a data processing controller (7). The beam drift monitoring and separating unit generate a reference beam with the same drift as the measurement beam. The measurement beam carries both angular deflection information of the measurement mirror and the angular beam drift information, while the reference beam carries only the angular beam drift information. The data processing controller gives out a signal to the beam steering device in real-time according to the magnitude of drift of the reference beam, to compensate the drift of the measurement beam.

Abstract: A micro-cavity measuring method and equipment based on micro focal-length collimation are provided. The equipment can be used to measure irregular micro-cavities and “sub-macro” micro-cavities. Wherein a cylindrical or spherical lens with micro focal-length is combined with a fiber probe(11,12) to form a collimating and imaging optical system of a point light source(8), and the collimating and imaging optical system transforms the two or three dimensional movement of the fiber probe(11,12) into a change in image ultra-highly sensitively. A lot of advantages are obtained, i.e., micro measuring force, high aspect ratio, easy miniaturization, high resolution, simple construction and high speed.

Abstract: Photoelectric autocollimation methods and apparatuses based on beam drift compensation are provided. The methods and apparatuses can be used to achieve a high autocollimation angle measurement accuracy. The apparatuses includes an autocollimator, a measurement mirror (12a), a beam drift monitoring and separating unit, a beam steering device (8), and a data processing controller (7). The beam drift monitoring and separating unit generate a reference beam with the same drift as the measurement beam. The measurement beam carries both angular deflection information of the measurement mirror and the angular beam drift information, while the reference beam carries only the angular beam drift information. The data processing controller gives out a signal to the beam steering device in real-time according to the magnitude of drift of the reference beam, to compensate the drift of the measurement beam.

Abstract: An ultraprecision non-contact three-dimensional probing system based on a spherical capacitive plate has a probe (12) which comprises a spherical probing head (5), a stylus pipe (6), an active shielding pipe (8), a signal conducting rod (7), an insulating element (9), a stylus holder (10) and a probe body (11). The stylus pipe (6), the active shielding pipe (8) and the signal conducting rod (7) are coaxially assembled, and they are insulated against each other with the insulating element (9). The spherical probing head (5) is mounted at one end of the insulating element (9), and it has a spherical capacitive plate over its surface. The capacitive signal coming from the spherical capacitive plate is outputted through the signal conducting rod (7).

Abstract: A micro-cavity measuring method and equipment based on micro focal-length collimation are provided. The equipment can be used to measure irregular micro-cavities and “sub-macro” micro-cavities. Wherein a cylindrical or spherical lens with micro focal-length is combined with a fiber probe(11,12) to form a collimating and imaging optical system of a point light source(8), and the collimating and imaging optical system transforms the two or three dimensional movement of the fiber probe(11,12) into a change in image ultra-highly sensitively. A lot of advantages are obtained, i.e., micro measuring force, high aspect ratio, easy miniaturization, high resolution, simple construction and high speed.