Patents by Inventor Jiwon Yeon

Jiwon Yeon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck
    Patent number: 11574833
    Abstract: An electrostatic chuck fixes a substrate and includes a first area and a second area adjacent to the first area. The electrostatic chuck includes a first electrode portion disposed in the first area and a second electrode portion disposed in the second area. The first electrode portion has a first width, and the second electrode portion has a second width smaller than the first width.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: February 7, 2023
    Assignee: Samsung Display Co., Ltd.
    Inventors: Juhee Lee, Cheollae Roh, Soo Beom Jo, Myungsoo Huh, Voronov Alexander, Jiwon Yeon, Haeyoung Yoo, Yongmun Chang
  • ELECTROSTATIC CHUCK
    Publication number: 20210358791
    Abstract: An electrostatic chuck fixes a substrate and includes a first area and a second area adjacent to the first area. The electrostatic chuck includes a first electrode portion disposed in the first area and a second electrode portion disposed in the second area. The first electrode portion has a first width, and the second electrode portion has a second width smaller than the first width.
    Type: Application
    Filed: February 9, 2021
    Publication date: November 18, 2021
    Inventors: Juhee Lee, Cheollae Roh, Soo Beom Jo, Myungsoo Huh, Voronov Alexander, Jiwon Yeon, Haeyoung Yoo, Yongmun Chang