Abstract: In one example, an electronic device comprises a substrate comprising a conductive structure and an inner side and an outer side, a first electronic component over the inner side of the substrate and coupled with the conductive structure, a lid over the substrate and the first electronic component and comprising a first hole in the lid, and a thermal interface material between the first electronic component and the lid. The thermal interface material is in the first hole. Other examples and related methods are also disclosed herein.

Abstract: A multiple hydraulic robot system for precisely installing a girder according to the present disclosure may comprise: four hydraulic robots connected to both sides of two connection plates which are coupled to both ends of the top surface of a girder installed between bridge piers and to which cables of a crane are connected, wherein the robots move the girder horizontally and vertically; a hydraulic system for operating actuators of the four hydraulic robots; and a controller which controls the remotely operated four hydraulic robots by means of a synchronization control algorithm to precisely adjust the installing position of the girder.

Abstract: A phase shift mask formed by depositing on a transparent substrate a phase shifter material containing chromium (Cr), aluminum (Al), oxygen (O) and nitrogen (N). The transmissivity of a phase shifting layer of the phase shift mask, which is a CrAION layer, is increases, and the phase of exposure light is shifted by 180° at a predetermined thickness, so that a fine photoresist pattern can be formed. Also, the transmissivity of the phase shifting layer with respect to inspection light, which has a longer wavelength than exposure light, is relatively low, which permits accurate inspection of the mask. The phase shift mask can be useful in photolithography using a short wavelength of exposure light, and in an inspection apparatus using an inspection light source having a longer wavelength than exposure light.