Patents by Inventor Jo-Ling PAN

Jo-Ling PAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fault detection and classification matching
    Patent number: 10126210
    Abstract: Raw data from chambers is received. Based on received raw data, if a fault exists in operations of the chambers is detected. The detecting includes at least one of operations outlined below. Sigma values respectively corresponding to the chambers are generated based on the raw data of the chambers. A determination is made to determine whether a sigma ratio corresponding to the sigma values is smaller than a threshold value. Mean outlier indexes respectively corresponding to the chambers is generated by executing a mean matching process for the chambers in a condition that the sigma ratio is smaller than the threshold value. One of the chambers, which has a worst first mean outlier index of the first mean outlier indexes, is identified as a target chamber having fault operation.
    Type: Grant
    Filed: May 12, 2016
    Date of Patent: November 13, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Jen Chou, Yu-Jhen Liu, Yi-Ting Tsai, Jo-Ling Pan
  • FAULT DETECTION AND CLASSIFICATION MATCHING
    Publication number: 20170030807
    Abstract: Raw data from chambers is received. Based on received raw data, if a fault exists in operations of the chambers is detected. The detecting includes at least one of operations outlined below. Sigma values respectively corresponding to the chambers are generated based on the raw data of the chambers. A determination is made to determine whether a sigma ratio corresponding to the sigma values is smaller than a threshold value. Mean outlier indexes respectively corresponding to the chambers is generated by executing a mean matching process for the chambers in a condition that the sigma ratio is smaller than the threshold value. One of the chambers, which has a worst first mean outlier index of the first mean outlier indexes, is identified as a target chamber having fault operation.
    Type: Application
    Filed: May 12, 2016
    Publication date: February 2, 2017
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Jen CHOU, Yu-Jhen LIU, Yi-Ting TSAI, Jo-Ling PAN