Patents by Inventor Joachim Arit

Joachim Arit has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic device for supporting wafers and other components for use at temperatures of up to 230° C.
    Patent number: 6215641
    Abstract: An electrostatic chuck for clamping an electrically conducting workpiece includes an electrode that is incorporated between two insulating layers of an organic material, preferably polyimide, and that is mounted, with or without a coating, on a metallic pedestal. An insulating intermediate layer, for example, in the form of an intermediate ring having a thickness equal to or up to 10% greater than the thickness of the electrode, provided for eliminating a gap at the edge of the electrostatic chuck.
    Type: Grant
    Filed: March 4, 1999
    Date of Patent: April 10, 2001
    Assignee: VenTec Gesellschaft für Venturekapital und Unternehmensberatung
    Inventors: Karl-Hermann Busse, Joachim Arit