Patents by Inventor Joachim Fritz
Joachim Fritz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11905166Abstract: A production method for a micromechanical component for a sensor or microphone device. The method includes: patterning a plurality of first trenches through a substrate surface of a monocrystalline substrate made of at least one semiconductor material using anisotropic etching, covering the lateral walls of the plurality of first trenches with a passivation layer, while bottom areas of the plurality of first trenches are kept free or are freed of the passivation layer, etching at least one first cavity, into which the plurality of first trenches opens, into the monocrystalline substrate using an isotropic etching method, in which an etching medium of the isotropic etching method is conducted through the plurality of first trenches, and by covering the plurality of first trenches by epitaxially growing a monocrystalline sealing layer on the substrate surface of the monocrystalline substrate made of the at least one identical semiconductor material as the monocrystalline substrate.Type: GrantFiled: September 3, 2021Date of Patent: February 20, 2024Assignee: ROBERT BOSCH GMBHInventors: Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Andreas Scheurle, Joachim Fritz, Sophielouise Mach
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Publication number: 20230304881Abstract: A micromechanical component. The micromechanical component includes: a membrane; the membrane includes at least one reinforcement structure of a geometrically defined shape, which reinforces the membrane in a defined manner, in the region of at least one anchor structure and/or in the region of at least one connecting structure.Type: ApplicationFiled: October 6, 2021Publication date: September 28, 2023Inventors: Heribert Weber, Andreas Scheurle, Joachim Fritz, Peter Schmollngruber, Sophielouise Mach, Thomas Friedrich
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Publication number: 20220081285Abstract: A production method for a micromechanical component for a sensor or microphone device. The method includes: patterning a plurality of first trenches through a substrate surface of a monocrystalline substrate made of at least one semiconductor material using anisotropic etching, covering the lateral walls of the plurality of first trenches with a passivation layer, while bottom areas of the plurality of first trenches are kept free or are freed of the passivation layer, etching at least one first cavity, into which the plurality of first trenches opens, into the monocrystalline substrate using an isotropic etching method, in which an etching medium of the isotropic etching method is conducted through the plurality of first trenches, and by covering the plurality of first trenches by epitaxially growing a monocrystalline sealing layer on the substrate surface of the monocrystalline substrate made of the at least one identical semiconductor material as the monocrystalline substrate.Type: ApplicationFiled: September 3, 2021Publication date: March 17, 2022Inventors: Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Andreas Scheurle, Joachim Fritz, Sophielouise Mach
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Patent number: 11208319Abstract: A method for manufacturing a MEMS unit for a micromechanical pressure sensor. The method includes the steps: providing a MEMS wafer including a silicon substrate and a first cavity formed therein, under a sensor membrane; applying a layered protective element on the MEMS water; and exposing a sensor core from the back side, a second cavity being formed between the sensor core and the surface of the silicon substrate, and the second cavity being formed with the aid of an etching process which is carried out with the aid of etching parameters changed in a defined manner; and removing the layered protective element.Type: GrantFiled: February 13, 2018Date of Patent: December 28, 2021Assignee: Robert Bosch GmbHInventors: Arne Dannenberg, Joachim Fritz, Thomas Friedrich, Torsten Kramer
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Publication number: 20210354978Abstract: A micromechanical component for a sensor or microphone device, including a substrate, a frame structure, which is situated on the substrate surface and/or at least one intermediate layer, and a diaphragm, which spans an inner volume, which is at least partially framed by the frame structure. The micromechanical component includes a bending beam structure, which is situated in the inner volume and includes at least one anchoring area, which is attached to the frame structure, to the substrate surface and/or to the at least one intermediate layer, and at least one self-supporting area, which is connected via at least one coupling structure to the diaphragm inner side of the diaphragm in such a way that the at least one self-supporting area is bendable by way of a warping of the diaphragm.Type: ApplicationFiled: May 10, 2021Publication date: November 18, 2021Inventors: Heribert Weber, Andreas Scheurle, Joachim Fritz, Peter Schmollngruber, Sophielouise Mach, Thomas Friedrich
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Patent number: 10988377Abstract: A method for producing a micromechanical pressure sensor. The method includes: providing a MEMS wafer having a silicon substrate and a first cavity developed therein underneath a sensor diaphragm; providing a second wafer; bonding the MEMS wafer to the second wafer; and exposing a sensor core from the rear side; a second cavity being formed in the process between the sensor core and the surface of the silicon substrate, and the second cavity being developed with the aid of an etching process which is carried out using etching parameters that are modified in a defined manner.Type: GrantFiled: September 18, 2017Date of Patent: April 27, 2021Assignee: Robert Bosch GmbHInventors: Arne Dannenberg, Torsten Kramer, Joachim Fritz, Thomas Friedrich
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Publication number: 20200024133Abstract: A method for manufacturing a MEMS unit for a micromechanical pressure sensor. The method includes the steps: providing a MEMS wafer including a silicon substrate and a first cavity formed therein, under a sensor membrane; applying a layered protective element on the MEMS water; and exposing a sensor core from the back side, a second cavity being formed between the sensor core and the surface of the silicon substrate, and the second cavity being formed with the aid of an etching process which is carried out with the aid of etching parameters changed in a defined manner; and removing the layered protective element.Type: ApplicationFiled: February 13, 2018Publication date: January 23, 2020Inventors: Arne Dannenberg, Joachim Fritz, Thomas Friedrich, Torsten Kramer
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Publication number: 20190202687Abstract: A method for producing a micromechanical pressure sensor. The method includes: providing a MEMS wafer having a silicon substrate and a first cavity developed therein underneath a sensor diaphragm; providing a second wafer; bonding the MEMS wafer to the second wafer; and exposing a sensor core from the rear side; a second cavity being formed in the process between the sensor core and the surface of the silicon substrate, and the second cavity being developed with the aid of an etching process which is carried out using etching parameters that are modified in a defined manner.Type: ApplicationFiled: September 18, 2017Publication date: July 4, 2019Inventors: Arne Dannenberg, Torsten Kramer, Joachim Fritz, Thomas Friedrich
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Patent number: 9195054Abstract: A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.Type: GrantFiled: August 24, 2009Date of Patent: November 24, 2015Assignee: ROBERT BOSCH GMBHInventors: Tjalf Pirk, Stefan Pinter, Joerg Muchow, Joachim Fritz, Christoph Friese
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Patent number: 8896897Abstract: A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.Type: GrantFiled: September 16, 2009Date of Patent: November 25, 2014Assignee: Robert Bosch GmbHInventors: Stefan Pinter, Joerg Muchow, Joachim Fritz, Christoph Friese
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Patent number: 8847336Abstract: In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.Type: GrantFiled: November 28, 2008Date of Patent: September 30, 2014Assignee: Robert Bosch GmbHInventors: Tjalf Pirk, Stefan Pinter, Hubert Benzel, Heribert Weber, Michael Krueger, Robert Sattler, Frederic Njikam Njimonzie, Joerg Muchow, Joachim Fritz, Christoph Schelling, Christoph Friese
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Patent number: 8629635Abstract: A method for operating an electrostatic drive having a stator electrode and an actuator electrode which are designed as multilayer electrodes having subunits includes: predeflecting the actuator electrode with respect to the stator electrode from its non-energized starting position into a first end position by applying a first potential to the first stator electrode subunit, and applying a second potential which is different from the first potential to the first actuator electrode subunit, and applying a third potential which is different from the first potential and the second potential, to the second stator electrode subunit and to the second actuator electrode subunit.Type: GrantFiled: September 24, 2009Date of Patent: January 14, 2014Assignee: Robert Bosch GmbHInventors: Tjalf Pirk, Stefan Pinter, Joachim Fritz, Christoph Friese
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Patent number: 8581470Abstract: An electrode comb for a micromechanical component includes at least one electrode finger for which a first electrode finger subunit with a first central longitudinal axis and a second electrode finger subunit with a second central longitudinal axis are defined. The second central longitudinal axis are defined is inclined in relation to the first central longitudinal axis about a bend angle not equal to 0° and not equal to 180°.Type: GrantFiled: December 4, 2008Date of Patent: November 12, 2013Assignee: Robert Bosch GmbHInventors: Tjalf Pirk, Stefan Pinter, Joerg Muchow, Joachim Fritz
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Patent number: 8384975Abstract: A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.Type: GrantFiled: September 29, 2010Date of Patent: February 26, 2013Assignee: Robert Bosch GmbHInventors: Tjalf Pirk, Stefan Pinter, Joachim Fritz, Christoph Friese
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Patent number: 8179584Abstract: A micromechanical component having a base part, a swiveling part, which has an electrically conductive material, and a swiveling part insulation which electrically insulates a first and a second section of the swiveling part from each other. A first flexible, electrically conductive connecting element connects the base part to the first swiveling part section, and a second flexible, electrically conductive connecting element connects the base part to the second swiveling part section.Type: GrantFiled: November 21, 2008Date of Patent: May 15, 2012Assignee: Robert Bosch GmbHInventors: Stefan Pinter, Joachim Fritz
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Publication number: 20110260658Abstract: A method for operating an electrostatic drive having a stator electrode and an actuator electrode which are designed as multilayer electrodes having subunits includes: predeflecting the actuator electrode with respect to the stator electrode from its non-energized starting position into a first end position by applying a first potential to the first stator electrode subunit, and applying a second potential which is different from the first potential to the first actuator electrode subunit, and applying a third potential which is different from the first potential and the second potential, to the second stator electrode subunit and to the second actuator electrode subunit.Type: ApplicationFiled: September 24, 2009Publication date: October 27, 2011Inventors: Tjalf Pirk, Stefan Pinter, Joachim Fritz, Christoph Friese
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Publication number: 20110261428Abstract: A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.Type: ApplicationFiled: September 16, 2009Publication date: October 27, 2011Inventors: Stefan Pinter, Joerg Muchow, Joachim Fritz, Christoph Friese
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Publication number: 20110254404Abstract: An electrostatic drive is described having an inner frame, at least one intermediate frame, which encloses the inner frame, and an outer frame, which encloses the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected to one another via at least one spring element, the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements lie on a common longitudinal spring axis, and electrode fingers being situated on frame bars, which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame. A manufacturing method for an electrostatic drive, a micromechanical component, and a manufacturing method for a micromechanical component, are also described.Type: ApplicationFiled: August 24, 2009Publication date: October 20, 2011Applicant: Robert Bosch GMBHInventors: Tjalf Pirk, Stefan Pinter, Michael Krueger, Joerg Muchow, Joachim Fritz, Christoph Friese
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Publication number: 20110248601Abstract: A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.Type: ApplicationFiled: August 24, 2009Publication date: October 13, 2011Inventors: Tjalf Pirk, Stefan Pinter, Joerg Muchow, Joachim Fritz, Christoph Friese
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Publication number: 20110199172Abstract: A magnetic yoke (10) having a magnet (12) having a magnetization direction (14) on which a first yoke arm (18a) and a second yoke arm (18b) are mounted in such a way that the magnet (12) and the two yoke arms (18a, 18b) define a yoke intermediate space (20) extending from a front side to a rear side of the magnetic yoke; and first pole shoe (22a) configured on the first yoke arm (18a) and a second pole shoe (22b) configured on the second yoke arm (18b), between which a yoke gap (24) is located; the first pole shoe (22a) having a first width (b1) at a first end (40a) on the front side of the magnetic yoke (10), in parallel to the magnetization direction (14) of the magnet (12), and having a second width (b2) unequal to the first width (b1) at a second end (42a) facing opposite the first end (40a) on the rear side of the magnetic yoke (10), in parallel to the magnetization direction (14) of the magnet (12).Type: ApplicationFiled: August 3, 2009Publication date: August 18, 2011Inventors: Tjalf Pirk, Stefan Pinter, Joerg Muchow, Joachim Fritz, Christoph Friese