Patents by Inventor Joachim Janisch

Joachim Janisch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chamber wall heating for a millisecond anneal system
    Patent number: 10957563
    Abstract: Systems and methods for reducing contamination on reflective mirrors disposed on chamber walls in a millisecond anneal system are provided. In one example implementation, the reflective mirrors can be heated by one or more of (1) heating the fluid in the closed fluid system for regulating the temperature of the reflective mirrors; (2) electrical cartridge heater(s) or heater ribbon(s) attached to the reflective mirrors; and/or (3) use of lamp light inside the chamber.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: March 23, 2021
    Assignees: Mattson Technology, Inc., Beijing E-Town Semiconductor Technology Co., Ltd.
    Inventors: Joachim Janisch, Manuel Mueller
  • Chamber Wall Heating for a Millisecond Anneal System
    Publication number: 20170194175
    Abstract: Systems and methods for reducing contamination on reflective mirrors disposed on chamber walls in a millisecond anneal system are provided. In one example implementation, the reflective mirrors can be heated by one or more of (1) heating the fluid in the closed fluid system for regulating the temperature of the reflective mirrors; (2) electrical cartridge heater(s) or heater ribbon(s) attached to the reflective mirrors; and/or (3) use of lamp light inside the chamber.
    Type: Application
    Filed: December 15, 2016
    Publication date: July 6, 2017
    Inventors: Joachim Janisch, Manuel Mueller