Abstract: Provided herein is an apparatus, including an excitation arm including excitation optics; a collection arm including collection optics, wherein the excitation arm and the collection arm are geometrically off-axis from one another for independent control of the excitation optics or the collection optics; and a full-surface spectroscopic analyzer to analyze a thin-film over an article from Raman-scattered light collected by the collection optics.

Abstract: Provided herein is an apparatus, including a photon emitter configured to emit photons onto a surface of an article at a number of azimuthal angles; and a processing element configured to process photon-detector-array signals corresponding to photons scattered from surface features of the article and generate one or more surface features maps for the article from the photon-detector-array signals corresponding to the photons scattered from the surface features of the article.

Abstract: Provided herein is an apparatus including a photon emitter configured for reflecting photons from a surface of an article onto a first reflective surface. In addition, a second reflective surface is configured for reflecting photons from the surface of the article back onto the surface of the article. The apparatus also includes a detector configured to provide information corresponding to photons scattered from features of the article.

Abstract: Provided herein is an apparatus, including a photon emitter configured to emit photons onto a surface of an article at a number of azimuthal angles; and a processing element configured to process photon-detector-array signals corresponding to photons scattered from surface features of the article and generate one or more surface features maps for the article from the photon-detector-array signals corresponding to the photons scattered from the surface features of the article.

Abstract: Provided herein is an apparatus, including a light source configured to illuminate a surface of an article. In addition, the apparatus includes a light detector array. The light detector array includes a number of light sensors configured to simultaneously receive scattered light from features about the entire surface. The light detector array is configured to provide information for qualitatively and quantitatively characterizing the features.

Abstract: Provided herein is an apparatus, including a photon emitter configured to emit photons onto a surface of an article at a number of azimuthal angles; and a processing element configured to process photon-detector-array signals corresponding to photons scattered from surface features of the article and generate one or more surface features maps for the article from the photon-detector-array signals corresponding to the photons scattered from the surface features of the article.

Abstract: Provided herein is an apparatus, including a light source configured to illuminate a surface of an article, wherein light incident upon the surface of the article is collimated light; a light detector array including a plurality of light sensors configured to receive scattered light from features about the surface of the article; and a processing means for mapping the features about the surface of the article, wherein the processing means is configured to map the features by analyzing the scattered light received at the light detector array.

Abstract: Provided herein is an apparatus, including an excitation arm including excitation optics; a collection arm including collection optics, wherein the excitation arm and the collection arm are geometrically off-axis from one another for independent control of the excitation optics or the collection optics; and a full-surface spectroscopic analyzer to analyze a thin-film over an article from Raman-scattered light collected by the collection optics.

Abstract: Provided herein is an apparatus including a photon emitter configured for reflecting photons from a surface of an article onto a first reflective surface. In addition, a second reflective surface is configured for reflecting photons from the surface of the article back onto the surface of the article. The apparatus also includes a detector configured to provide information corresponding to photons scattered from features of the article.

Abstract: Provided herein is an apparatus, including a photon emitter and a photon detector array. The photon emitter is configured to emit photons onto an entire surface edge of an article. The photon detector array is configured to receive scattered photons from the entire surface edge of the article, and includes a number of photon detectors. The scattered photons are photons emitted from the photon emitter that are scattered from features of the surface edge of the article.

Abstract: Provided herein is an apparatus, including a photon emitter configured for emitting photons onto a surface of an article; a first reflective surface and a second reflective surface configured to reflect the photons onto the surface of the article; and a processing means configured for processing signals from a photon detector array corresponding to photons scattered from surface features of the article.

Abstract: Provided herein is an apparatus, including a photon emitting means for emitting photons onto surface edges of an article, a photon detecting means for detecting photons scattered from particles on the surface edges of the article, and a mapping means for mapping a particle or a defect of the surface of the article.

Abstract: Provided herein is an apparatus, including a light source configured to illuminate a surface of an article, wherein light incident upon the surface of the article is collimated light; a light detector array including a plurality of light sensors configured to receive scattered light from features about the surface of the article; and a processing means for mapping the features about the surface of the article, wherein the processing means is configured to map the features by analyzing the scattered light received at the light detector array.

Abstract: Provided herein is an apparatus, including a photon emitting means for emitting photons onto a surface of an article, a photon detecting means for detecting photons scattered from features in the surface of the article; and a mapping means for mapping the features in the surface of the article, wherein the apparatus is configured to process more than one article every 100 seconds.

Abstract: Provided herein is an apparatus, including a photon emitting means configured to emit photons onto a surface of an article at a number of azimuthal angles; and a processing means configured to process photon-detector-array signals corresponding to photons scattered from surface features of the article and generate one or more surface features maps for the article from the photon-detector-array signals corresponding to the photons scattered from the surface features of the article.

Abstract: Provided herein is an apparatus, including a photon emitting means for emitting photons onto surface edges of an article, a photon detecting means for detecting photons scattered from particles on the surface edges of the article, and a mapping means for mapping a particle or a defect of the surface of the article.

Abstract: Provided herein is an apparatus, including a photon emitter configured for emitting photons onto a surface of an article; a first reflective surface and a second reflective surface configured to reflect the photons onto the surface of the article; and a processing means configured for processing signals from a photon detector array corresponding to photons scattered from surface features of the article.

Abstract: Provided herein is an apparatus, including a photon emitting means for emitting photons onto a surface of an article, a photon detecting means for detecting photons scattered from features in the surface of the article; and a mapping means for mapping the features in the surface of the article, wherein the apparatus is configured to process more than one article every 100 seconds.

Abstract: A contact pad includes a first layer of material with a first yield strength and a second layer of material with a second yield strength is laminated to the first layer. A third yield strength of the laminated composite of the first layer and the second layer exceeds the first yield strength and the second yield strength due to the Hall-Petch phenomenon. An overcoat covers an edge of the first layer and the second layer of the contact pad to prevent wear. A method of creating the contact pad or other microelectronic structure includes depositing a first layer of material with a first yield strength on a substrate. A second layer of material with a second yield strength is deposited on the first layer. An edge of the first layer and the second layer is coated with an overcoat material to prevent wear of the first and second layers.

Abstract: A contact pad includes a first layer of material with a first yield strength and a second layer of material with a second yield strength is laminated to the first layer. A third yield strength of the laminated composite of the first layer and the second layer exceeds the first yield strength and the second yield strength due to the Hall-Petch phenomenon. An overcoat covers an edge of the first layer and the second layer of the contact pad to prevent wear. A method of creating the contact pad or other microelectronic structure includes depositing a first layer of material with a first yield strength on a substrate. A second layer of material with a second yield strength is deposited on the first layer. An edge of the first layer and the second layer is coated with an overcoat material to prevent wear of the first and second layers.