Abstract: Provided is a gyroscope including: a first inertial body that is displaceable in a first direction and a second direction perpendicular to the first direction; a second inertial body that is displaceable in the first direction and the second direction; a third inertial body that is displaceable in the first direction and the second direction; a fourth inertial body that is displaceable in the first direction and the second direction; a first connection unit that supports the first inertial body; a second connection unit that supports the second inertial body; a third connection unit that supports the third inertial body; a fourth connection unit that supports the fourth inertial body; and a connection body that is provided among the first inertial body, the second inertial body, the third inertial body, and the fourth inertial body and connects the first inertial body, the second inertial body, the third inertial body, and the fourth inertial body.

Abstract: The purpose of this invention is obtaining a gyroscope with high Q factor, high as fabricated symmetry and reducing the quadrature error. One aspect of this invention is a gyroscope including a semiconductor chip. This semiconductor chip comprising a substrate, first mass, second mass, connection unit. The first mass can move in any direction of a X-Y plane. The second mass can move in any direction of the X-Y plane. The connection unit located between the first mass and the second mass mechanically connects the first mass and the second mass.

Abstract: Provided is a gyroscope including: a first inertial body that is displaceable in a first direction and a second direction perpendicular to the first direction; a second inertial body that is displaceable in the first direction and the second direction; a third inertial body that is displaceable in the first direction and the second direction; a fourth inertial body that is displaceable in the first direction and the second direction; a first connection unit that supports the first inertial body; a second connection unit that supports the second inertial body; a third connection unit that supports the third inertial body; a fourth connection unit that supports the fourth inertial body; and a connection body that is provided among the first inertial body, the second inertial body, the third inertial body, and the fourth inertial body and connects the first inertial body, the second inertial body, the third inertial body, and the fourth inertial body.

Abstract: The purpose of this invention is obtaining a gyroscope with high Q factor, high as fabricated symmetry and reducing the quadrature error. One aspect of this invention is a gyroscope including a semiconductor chip. This semiconductor chip comprising a substrate, first mass, second mass, connection unit. The first mass can move in any direction of a X-Y plane. The second mass can move in any direction of the X-Y plane. The connection unit located between the first mass and the second mass mechanically connects the first mass and the second mass.

Abstract: A gyroscope includes connecting portions which are provided between a mass body and a mass body and connects the mass body with the mass body. Here, the connecting portions includes a fixing portion fixed to a substrate, a shuttle provided between the fixing portion and the mass body, a shuttle provided between the fixing portion and the mass body, a beam connecting the fixing portion with the shuttle, a beam connecting the fixing portion with the shuttle, a beam connecting the mass body with the shuttle, a beam connecting the mass body with the shuttle, and a beam connecting the shuttle with the shuttle. The fixing portion is provided between the shuttle and the shuttle.