Patents by Inventor Joas Chavez

Joas Chavez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alternating phase shift masking
    Publication number: 20070231712
    Abstract: An alternating phase shift mask may be formed using a dry undercut etch. The dry undercut etch reduces problems associated with wet etching of quartz or glass masks. In addition, the use of the dry undercut etch enables image balancing between the zero and pi apertures. This approach is not limited by specific optical proximity corrected design patterns or chromium layer thickness.
    Type: Application
    Filed: March 30, 2006
    Publication date: October 4, 2007
    Inventors: Song Pang, Jeff Farnsworth, Kishore Chakravorty, Karmen Yung, Joas Chavez