Abstract: An optical station for a laser processing device including a plurality of holders for holding respective optical elements; a rotatable magazine having a plurality of accommodation spaces for accommodating the plurality of holders; a positioning device having a holder clamp for clamping and positioning a selected one of the optical elements. a magazine actuator for rotating the magazine; linear shifting means for shifting the magazine in a direction parallel to the optical axis, wherein the magazine is shifted towards the positioning device such that the positioning device lifts the holder from its accommodation space.

Abstract: An optical station for a laser processing device including a plurality of holders for holding respective optical elements; a rotatable magazine having a plurality of accommodation spaces for accommodating the plurality of holders; a positioning device having a holder clamp for clamping and positioning a selected one of the optical elements. a magazine actuator for rotating the magazine; linear shifting means for shifting the magazine in a direction parallel to the optical axis, wherein the magazine is shifted towards the positioning device such that the positioning device lifts the holder from its accommodation space.

Abstract: The present invention relates to an apparatus (10) for aligning an optical device with an object. The apparatus comprises, a frame (12), a support unit (16) for supporting said optical device or said object and a transportation device (14) arranged to at least tilt the support unit in relation to the frame, wherein a segment of a sphere (18, 22) is provided, which segment defines a spherical surface (20), and the tilting movement of the support unit is controlled by said spherical surface. The apparatus according to the invention allows for a tilting movement between said optical device and said object, while such movement does not lead to a shift in focus. Furthermore the invention relates to an optical instrument and a semiconductor process system comprising said apparatus.

Abstract: The present invention relates to an apparatus (10) for aligning an optical device with an object. The apparatus comprises, a frame (12), a support unit (16) for supporting said optical device or said object and a transportation device (14) arranged to at least tilt the support unit in relation to the frame, wherein a segment of a sphere (18, 22) is provided, which segment defines a spherical surface (20), and the tilting movement of the support unit is controlled by said spherical surface. The apparatus according to the invention allows for a tilting movement between said optical device and said object, while such movement does not lead to a shift in focus. Furthermore the invention relates to an optical instrument and a semiconductor process system comprising said apparatus.