Patents by Inventor Jochen Guske

Jochen Guske has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pedestal alignment tool for an orienter pedestal of an ion implant device
    Patent number: 9691513
    Abstract: A pedestal alignment tool for adjusting an orienter pedestal of an ion implant device is provided, wherein the pedestal is configured to orient a wafer prior to implantation in the ion implant device, the pedestal alignment tool comprising supporting elements configured for contacting a surface of the pedestal, a base comprising a top surface and openings for receiving the supporting elements, and adjustment means configured for adjusting lengths of the supporting elements over which the supporting elements protrude from the top surface of the base.
    Type: Grant
    Filed: June 17, 2016
    Date of Patent: June 27, 2017
    Assignee: GLOBALFOUNDRIES Inc.
    Inventor: Jochen Guske