Abstract: A MEMS component. The MEMS component includes: a substrate having a cavity and a base, an interaction element arranged above the cavity and connected to the base, including a bending beam, a boundary layer at a distance from the bending beam via connecting elements and defining a hollow space with the bending beam, and a backplate within the hollow space, the backplate being stiffer in relation to the boundary layer and the bending beam, at least one electrode, which forms a readable capacitance with a back electrode of the backplate, to capacitively detect a deflection of at least one of the bending beam, the connecting elements and the boundary layer, at least one stop element, configured to be displaced into a mechanical stop.

Abstract: A micromechanical component for a sensor device, including a seismic mass, which is situated at and/or in a mounting and which includes a first electrode area, a second electrode area electrically insulated from the first electrode area, and a connecting area made up of at least one electrically insulating material. The first electrode area and the second electrode area each mechanically contact the connecting area and are connected to one another via the connecting area. At least one first conductive area of the first electrode area and a second conductive area of the second electrode area are structured out of a first semiconductor and/or metal layer. The first electrode area also includes a third conductive area. The second electrode area also includes a fourth conductive area. The third conductive area and the fourth conductive area are structured out of a second semiconductor and/or metal layer.

Abstract: A MEMS microphone. The MEMS microphone includes: a membrane for absorbing sound pressure; a signal transduction element; and a lever element, coupled to the membrane and the signal transduction element. The lever element is configured, when the membrane is deflected, to generate a tilting movement and to transmit the generated tilting movement to the signal transduction element.

Abstract: A MEMS switch that includes a substrate with a first insulating layer and a silicon layer thereabove, a fixed portion and a movable switching portion being formed in the silicon layer. A first metal layer is situated in recesses in the silicon layer at a side of the silicon layer facing away from the substrate, the first metal layer forming at least one switchable electrical contact between the fixed portion and the switching portion. A method for manufacturing a MEMS switch including at least one embedded metal contact is also described.

Abstract: A MEMS relay. The MEMS relay includes: a movable switching element, on which a second switching surface is arranged in a first end section; a substrate having a first switching surface arranged thereon, which is designed to interact with the second switching surface; a switching electrode, to which an electrical switching voltage may be applied, the movable switching element being able to bring the second switching surface into contact with the first switching surface by way of an electrostatic force generated by the electrical switching voltage; at least one second compensation surface arranged in an end section of the movable switching element opposite the second switching surface; and a first compensation surface, which is designed to interact with the second compensation surface and is galvanically connected to the first switching surface via a cable.

Abstract: A micromechanical inertial sensor and a method for its operation. The micromechanical inertial sensor includes: a sensor element; a substrate having a substrate plane; a detection device for detecting a mechanical deflection due to tilting or deformation of the sensor element about a rotation axis substantially parallel to the substrate plane, wherein the mechanical deflection due to the tilting or deformation takes place along a detection direction substantially perpendicular to the substrate plane, wherein the detection device includes a first electrode structure and a second electrode structure that are firmly anchored to the substrate, wherein the detection device generates a measurement signal from the detected mechanical tilting or deformation of the sensor element about the rotation axis.

Abstract: A microelectromechanical device for capacitive fluid pressure measurement. The device has a first membrane and a second membrane which can be elastically deflected by a fluid pressure, wherein a cavity is formed between the first membrane and the second membrane, in which cavity a counter electrode is arranged, wherein the counter electrode has a plurality of radial etch channels which extend radially from the center of the counter electrode to an edge of the counter electrode. A microelectromechanical microphone, and a method for producing a microelectromechanical device, are also described.

Abstract: A micromechanical component for a pressure and inertial sensor device. The component includes a substrate having an upper substrate surface; a diaphragm having an inner diaphragm side oriented towards the upper substrate surface and an outer diaphragm side pointing away from the upper substrate surface, the inner diaphragm side bordering on an inner volume, in which a reference pressure is enclosed, and the diaphragm being able to be warped using a pressure difference between a pressure prevailing on its outer diaphragm side and the reference pressure; and a seismic mass situated in the inner volume, a sensor electrode, which projects out on the inner diaphragm side and extends into the inner volume, being displaceable with respect to the substrate due to a warping of the diaphragm. A pressure and inertial sensor device, and a method of manufacturing a micromechanical component for a pressure and inertial sensor device, are also described.

Abstract: A micromechanical device having a substrate with a main extension plane, a thin first functional layer over the substrate, and a thick second functional layer over the first functional layer. A fixed functional element and a movable functional element are formed in the second functional layer, The movable functional element is able to deflect in a first direction parallel to the main extension plane. The micromechanical device has a fixed stop element in the first functional layer, the movable functional element is also formed in the first functional layer and has a movable stop element there. The movable stop element can be applied to the fixed stop element when the movable functional element is deflected in the first direction.

Abstract: A microelectromechanical device for capacitive fluid pressure measurement. The microelectromechanical device has a first electrode and a second electrode forming a counter-electrode. The device has a cavity formed between a first boundary layer and a second boundary layer or a substrate, in which cavity the first electrode is arranged and movably mounted, wherein the first boundary layer and/or the second boundary layer can be deflected by a fluid pressure and wherein the first boundary layer and/or the second boundary layer is or are coupled to the first electrode by a first coupling element for transmitting a deflection movement to the movably mounted first electrode. A microelectromechanical pressure sensor, a microelectromechanical microphone, and a microelectromechanical combination sensor element, are also disclosed.

Abstract: A device for detecting sound in the surroundings of an automobile, including a first structure-borne noise sensor, which is acoustically coupled to a first oscillating body at an outside of the automobile and provides a first audio signal, including a second audio signal, which represents sound from an interior of the automobile, and including a processing unit, which is configured to subtract at least the second audio signal from the first audio signal.

Abstract: A contact element of a MEMS relay. The contact element includes a defined number greater than one of electrically conductive contact bodies, wherein the contact bodies are arranged at least partially within a layer that is plastically deformable in a defined manner, wherein a hardness of the plastically deformable layer is less than a hardness of the contact bodies, wherein, by exerting a compressive force on the contact bodies, the contact bodies can be pressed into the plastically deformable layer and brought to a substantially uniform height level, and wherein the plastically deformable layer is arranged at least partially within an insulation layer.

Abstract: A microelectromechanical component for interacting with a pressure gradient of a fluid. The microelectromechanical component has a substrate with a through-cavity, and a membrane structure which at least partially spans the through-cavity and has a central support structure and two membranes. A second membrane of the membrane structure has a second electrically conductive membrane electrode layer. The central support structure has a center electrode and a contacting element. The membranes are mechanically connected by spacer elements. The membrane structure has an inner region, an outer region, and a fastening region. The inner region is arranged centrally above the through-cavity. The outer region is arranged between the inner region and the fastening region. The fastening region is fastened to the substrate. The center electrode is arranged entirely within the inner region. The contacting element extends from the center electrode via the outer region into the fastening region.

Abstract: A micromechanical diaphragm system including a first diaphragm and a second diaphragm and spacer elements which are arranged between the first diaphragm and the second diaphragm. At least one spacer element has a first supporting element and a second supporting element. The first supporting element faces the first diaphragm. The second supporting element faces the second diaphragm. The first supporting element and the second supporting element are connected via a spring element.

Abstract: A micromechanical sensor device and a corresponding production method. The micromechanical sensor device has a substrate which has a front side and a rear side. Formed on the front side, at a lateral distance, are an inertial sensor region having an inertial structure for acquiring external accelerations and/or rotations, and a pressure sensor region having a diaphragm region for acquiring an external pressure. A micromechanical function layer by which the diaphragm region is formed in the pressure sensor region. A micromechanical function layer is applied on the micromechanical function layer, the inertial structure being formed out of the second and third micromechanical function layer. A cap device encloses a first predefined reference pressure in a first cavity in the inertial sensor region, and a second cavity is formed underneath the diaphragm region.

Abstract: A MEMS switch having a substrate, a micromechanical function layer situated above the substrate, and a fixed part and an electrically operable, deflectable switch element are developed in the micromechanical function layer, the switch element for closing an electrically conductive contact with the fixed part being suspended on at least one first spring in a deflectable manner. In a first operating state, the switch element is in a first position at a first distance from the fixed part, and the electrical contact is open. In a second operating state, the switch element is in a second position at a second distance from the fixed part, and the first spring is deflected and exerts a first restoring force, and the switch element establishes an operative connection with at least one second spring and the electrical contact is open. In a third operating state, the switch element is in a third position.

Abstract: A converter unit for electrical and/or acoustic signals and/or relative pressures. The converter unit includes: a substrate having a cavity, and an interaction unit arranged at least partially and/or completely above the cavity. An internal structure is arranged in a fluid-tight space of the interaction unit. The fluid-tight space is configured to retain a predetermined pressure. The internal structure includes a first layer, and a second layer which is connected to the first layer. The interaction unit is configured to detect and/or generate an acoustic or electrical signal and/or the relative pressure, based on a change in distance between the first layer and/or the second layer and at least one further structure arranged in the fluid-tight space. The interaction unit has a boundary layer which forms a floor and/or ceiling. The first layer and/or the second layer is arranged on the boundary layer by a connecting element.

Abstract: A relay. The relay includes a housing and a microelectromechanical (MEMS) component having a MEMS switch that can be switched between two stable states. The relay further comprises an application-specific integrated circuit (ASIC) component which, along with the MEMS component, is arranged in the housing. The ASIC component is configured to control the MEMS switch and/or to monitor a functionality of the MEMS switch.

Abstract: A micromechanical component for a rotation rate sensor. The component includes a first rotor which has a first side with a first seismic mass and a second side with a second seismic mass; a first lever element, the first end of which is connected on the first side via a first lever-coupling spring to the first seismic mass and which extends from its first end to its second end on a third side of the first rotor situated between the first side and the second side; a second lever element, the first end of which is connected on the second side via a second lever-coupling spring to the second seismic mass and which extends from its first end to its second end on the third side of the first rotor; and a first lever-element spring via which the first lever element and the second lever element are connected together.

Abstract: A micromechanical component for a capacitive sensor or switch device, having a substrate having a substrate surface, a diaphragm mounted on the substrate surface having a self-supporting region, at least one lever element and at least one first electrode connected to the at least one lever element. The at least one lever element is connected to the diaphragm in such a way that when there is a warping of the self-supporting region of the diaphragm the at least one lever element is set into a rotational movement, whereby the at least one connected first electrode is set into a first adjustment movement oriented at an angle to the substrate surface. The at least one lever element and the at least one first electrode connected to the at least one lever element are situated between the substrate surface and the diaphragm inner side of the self-supporting region of the diaphragm.