Patents by Inventor Jochen Wietzorrek

Jochen Wietzorrek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Collector configured of mirror shells
    Patent number: 7460212
    Abstract: There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.
    Type: Grant
    Filed: July 3, 2007
    Date of Patent: December 2, 2008
    Assignee: Carl-Zeiss SMT AG
    Inventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
  • Collector configured of mirror shells
    Publication number: 20080013680
    Abstract: There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.
    Type: Application
    Filed: July 3, 2007
    Publication date: January 17, 2008
    Applicant: Carl Zeiss SMT AG
    Inventors: Wolfgang Singer, Wilhelm Egle, Markus Wiess, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
  • Collector having unused region for illumination systems using a wavelength ?193 nm
    Patent number: 7244954
    Abstract: There is provided a collector for illumination systems for light having a wavelength ?193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
    Type: Grant
    Filed: October 4, 2005
    Date of Patent: July 17, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
  • Collector having unused region for illumination systems using a wavelength <193 nm
    Publication number: 20060097202
    Abstract: There is provided a collector for illumination systems for light having a wavelength ?193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
    Type: Application
    Filed: October 4, 2005
    Publication date: May 11, 2006
    Inventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
  • Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
    Patent number: 7015489
    Abstract: There is provided a collector for illumination systems for light having a wavelength ?193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
    Type: Grant
    Filed: July 23, 2003
    Date of Patent: March 21, 2006
    Assignee: Carl Zeiss SMT AG
    Inventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler
  • Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
    Publication number: 20040065817
    Abstract: There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
    Type: Application
    Filed: July 23, 2003
    Publication date: April 8, 2004
    Applicant: Carl Zeiss SMT AG
    Inventors: Wolfgang Singer, Wilhelm Egle, Markus Weiss, Joachim Hainz, Jochen Wietzorrek, Frank Melzer, Johannes Wangler