Patents by Inventor Joe Gortych

Joe Gortych has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation shield device and method
    Publication number: 20040041105
    Abstract: A radiation shield device (100) and method, the apparatus comprising either an absorbing shield (130), a scattering shield (200) or an absorbing and scattering shield (300) arranged in a processing tool (50) that irradiates a workpiece (70) with high-irradiance radiation (80) from a light source (78). The processing tool has a tool portion (66) having an irradiance damage threshold (IDT). The radiation shield device is designed to intercept a portion of the high-irradiance radiation that would otherwise be incident the tool portion, and to ensure that radiation exiting the particular shield comprising the radiation shield device and incident the tool portion has an irradiance below the tool portion irradiance damage threshold. The method includes using the radiation shield device in processing a workpiece using a processing tool.
    Type: Application
    Filed: August 29, 2003
    Publication date: March 4, 2004
    Applicant: ULTRATECH STEPPER, INC.
    Inventors: Andrew M. Hawryluk, Joe Gortych, Yu Chue Fong
  • Radiation shield device and method
    Patent number: 6617600
    Abstract: A radiation shield device (100) and method, the apparatus comprising either an absorbing shield (130), a scattering shield (200) or an absorbing and scattering shield (300) arranged in a processing tool (50) that irradiates a workpiece (70) with high-irradiance radiation (80) from a light source (78). The processing tool has a tool portion (66) having an irradiance damage threshold (IDT). The radiation shield device is designed to intercept a portion of the high-irradiance radiation that would otherwise be incident the tool portion, and to ensure that radiation exiting the particular shield comprising the radiation shield device and incident the tool portion has an irradiance below the tool portion irradiance damage threshold. The method includes using the radiation shield device in processing a workpiece using a processing tool.
    Type: Grant
    Filed: February 16, 2000
    Date of Patent: September 9, 2003
    Assignee: Ultratech Stepper, Inc.
    Inventors: Andrew M. Hawryluk, Joe Gortych, Yu Chue Fong