Patents by Inventor Joe Jamello

Joe Jamello has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dual-sided substrate measurement apparatus and methods
    Patent number: 8017424
    Abstract: An apparatus for measuring the relative positions of frontside and backside alignment marks located on opposite sides of a substrate is disclosed. The apparatus includes upper and lower optical systems that allow for simultaneous imaging of frontside and backside alignment marks. The frontside and backside alignment mark images are processed to determine the relative position of the marks, as a measurement of the alignment and/or overlay performance of the tool that formed the marks on the substrate.
    Type: Grant
    Filed: November 11, 2010
    Date of Patent: September 13, 2011
    Assignee: Ultratech, Inc.
    Inventors: Albert J Crespin, Jim Woodruff, Ray Ellis, Scott Kulas, Joe Jamello, Emily True
  • Dual-sided substrate measurement apparatus and methods
    Publication number: 20110058731
    Abstract: An apparatus for measuring the relative positions of frontside and backside alignment marks located on opposite sides of a substrate is disclosed. The apparatus includes upper and lower optical systems that allow for simultaneous imaging of frontside and backside alignment marks. The frontside and backside alignment mark images are processed to determine the relative position of the marks, as a measurement of the alignment and/or overlay performance of the tool that formed the marks on the substrate.
    Type: Application
    Filed: November 11, 2010
    Publication date: March 10, 2011
    Applicant: Ultratech, Inc.
    Inventors: Albert J. Crespin, Jim Woodruff, Ray Ellis, Scott Kulas, Joe Jamello, Emily True
  • Dual-sided substrate measurement apparatus and methods
    Patent number: 7902040
    Abstract: An apparatus for measuring the relative positions of frontside and backside alignment marks located on opposite sides of a substrate is disclosed. The apparatus includes upper and lower optical systems that allow for simultaneous imaging of frontside and backside alignment marks. The frontside and backside alignment mark images are processed to determine the relative position of the marks, as a measurement of the alignment and/or overlay performance of the tool that formed the marks on the substrate.
    Type: Grant
    Filed: October 2, 2008
    Date of Patent: March 8, 2011
    Assignee: Ultratech, Inc.
    Inventors: Albert J. Crespin, Jim Woodruff, Ray Ellis, Scott Kulas, Joe Jamello, Emily True
  • Dual-sided substrate measurement apparatus and methods
    Patent number: 7528937
    Abstract: An apparatus for measuring the relative positions of frontside and backside alignment marks located on opposite sides of a substrate is disclosed. The apparatus includes upper and lower optical systems that allow for simultaneous imaging of frontside and backside alignment marks. The frontside and backside alignment mark images are processed to determine the relative position of the marks, as a measurement of the alignment and/or overlay performance of the tool that formed the marks on the substrate.
    Type: Grant
    Filed: August 5, 2002
    Date of Patent: May 5, 2009
    Assignee: Ultratech, Inc.
    Inventors: Albert J. Crespin, Jim Woodruff, Ray Ellis, Scott Kulas, Joe Jamello, Emily True