Abstract: A unified process flow for the fabrication of an isolated vertical PNP (VPNP) transistor, a junction field effect transistor (JFET) and a metal/nitride/polysilicon capacitor includes the simultaneous fabrication of deep junction isolation regions (36, 121) and a VPNP buried collector (28). Junction isolation is completed by the doping and diffusion of shallow junction isolation regions (46, 122) at the same time that deep collector regions (48) are formed. A JFET source region (74) and a drain region (76) are formed simultaneously with a VPNP emitter region (70). A JFET gate contact region (88) is formed simultaenously with a VPNP base contact region (84), a VPNP buried region contact (86) and optionally with the doping of a capacitor electrode (124).

Abstract: A vertical PNP structure for use in a merged bipolar/CMOS technology has a P+ buried layer (84) as a collector region, which is isolated from the P substrate (48) by an N- buried layer (82). The P+ buried layer (84) diffuses downwards into the N- buried layer (82) and upwards into a P- epitaxy layer (52d) and into a base region (54c). The base region (54c) is formed in the same processing step as the N well region (54b) of the PMOS transistor (42) and the collection region (54a) of the NPN transistor (40). By diffusing into the base region (54c), the width between the collector (84) and emitter (64e) is reduced. The emitter (64e) can be formed in conjunction with the source and drain regions of the PMOS transistor (42).

Abstract: A semiconductor Hall effect device having a stable and more controllable offset voltage is formed, in one embodiment, of an N-type silicon epitaxial layer overlying a P-type silicon substrate, and a P+-type region is formed, for example, by ion implantation, in the surface of the epitaxial layer over the active area of the Hall element. The P+-type region effectively shields the surface of the Hall element to prevent induced surface potential variations. Current and voltage sense contacts are provided by N+-type regions which penetrate through the P+-type shield region to contact the N-type epitaxial layer.

Abstract: A buried n-channel junction field-effect transistor (JFET) fabricated in standard bipolar integrated circuit starting material. The transistor has a deep p-well as the bottom gate formed in an n-type body. The source is surrounded by the p-well while the drain is the epitaxial layer near the surface of the body outside the p-well. A buried channel connects the source and drain. A p-layer above the buried channel forms the top gate. Gate leakage current and noise are very low.

Abstract: A buried n-channel junction field-effect transistor (JFET) fabricated in standard bipolar integrated circuit starting material. The transistor has a deep p-well as the bottom gate formed in an n-type body. The source is surrounded by the p-well while the drain is the epitaxial layer near the surface of the body outside the p-well. A buried channel connects the source and drain. A p-layer above the buried channel forms the top gate. Gate leakage current and noise are very low.