Patents by Inventor Joe V. Abernathy

Joe V. Abernathy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer processing apparatus
    Patent number: 4875989
    Abstract: A processing apparatus and method for edge-preferential processing of partially fabricated integrated circuit wafers or of other substantially flat and thin workpieces. A plasma remote from the workpiece is used to generate activated species, and a baffle which is in proximity to the wafer face but not in contact with it is used to direct the stream of activated species. This module can be set up to perform both edge bead removal and bake of spun-on photoresist.
    Type: Grant
    Filed: December 5, 1988
    Date of Patent: October 24, 1989
    Assignee: Texas Instruments Incorporated
    Inventors: Cecil J. Davis, Robert T. Matthews, Lee M. Loewenstein, Joe V. Abernathy, Timothy A. Wooldridge