Abstract: A method for assembling a valve is disclosed. The valve includes a first fluid port, a second fluid port, a fluid path providing fluid communication therebetween, a moveable member, a biasing member and a pressure compensation membrane. The method includes the steps of providing a base member comprising an abutment for receiving a first of the biasing member and the pressure compensation membrane; assembling the biasing member and the pressure compensation membrane with the base member; and affixing a fixing member to the base member to retain the biasing member and the pressure compensation membrane between the fixing member and the abutment.

Abstract: A method for assembling a valve is disclosed. The valve includes a first fluid port, a second fluid port, a fluid path providing fluid communication therebetween, a moveable member, a biasing member and a pressure compensation membrane. The method includes the steps of providing a base member comprising an abutment for receiving a first of the biasing member and the pressure compensation membrane; assembling the biasing member and the pressure compensation membrane with the base member; and affixing a fixing member to the base member to retain the biasing member and the pressure compensation membrane between the fixing member and the abutment.

Abstract: A fluid sensing apparatus is provided having a fluid flow channel having a flow restriction. A fluid sensor is in fluid communication with first and second fluid ports, and a laminar flow element. The laminar flow element includes a flow stabilisation rod which defines a fluid sensing portion of the fluid flow channel. The flow restriction comprises a reduction in the hydraulic diameter of the fluid sensing portion of the fluid flow channel which is caused by a decrease in diameter of the fluid flow channel, or by an increase in the diameter of the flow stabilisation rod, or by both a decrease in diameter of the fluid flow channel and an increase in the diameter of the flow stabilisation rod. Also provided is a mass flow controller including such a fluid sensing apparatus.

Abstract: There is provided a fluid sensing apparatus (120) comprising a fluid flow channel (121) having a flow restriction (125), a first fluid port (132) at a first location (131) upstream of the flow restriction, a second fluid port (134) at a second location (133) downstream of the flow restriction, a fluid sensor (130) in fluid communication with the first fluid port and second fluid port, and a laminar flow element (150). The laminar flow element includes a flow stabilisation rod (151) which extends along the fluid flow channel at least from the first location to the second location to define a fluid sensing portion of the fluid flow channel between the outer wall (122) of the fluid flow channel and the outer surface (153) of the flow stabilisation rod.