Abstract: Methods of analyzing equivalency with respect to split and limited release lots of wafers of integrated circuits. One embodiment of the split-lot method includes: (1) dividing a set of data regarding the split lot into control and experimental subsets, (2) summarizing statistics regarding the set and the subsets to an experimental unit above a site level and (3) performing a two-way analysis of variance with respect to the statistics to determine the equivalency, using the set for one way of the analysis of variance and the subsets for another way of the analysis of variance.

Abstract: Methods of analyzing equivalency with respect to split and limited release lots of wafers of integrated circuits. One embodiment of the split-lot method includes: (1) dividing a set of data regarding the split lot into control and experimental subsets, (2) summarizing statistics regarding the set and the subsets to an experimental unit above a site level and (3) performing a two-way analysis of variance with respect to the statistics to determine the equivalency, using the set for one way of the analysis of variance and the subsets for another way of the analysis of variance.

Abstract: A method is disclosed wherewith a person skilled in the art of statistical quality control may use to determine whether a process or a product is statically equivalent to another of known quality, or conforms to a desired known quality. The method may also be used to determine whether multiplicities of products or processes are statistically equivalent to one another. The method makes the determination based calculating an equivalency index that is associated with the measured parametric data, the population ratio of data points within a set of parametric limits.

Abstract: The invention provides methods and systems for statistically comparing yields among two or more testers in a testing environment where a lot of manufactured articles such as semiconductor wafers are randomly divided among and independently tested by the testers. Generally, in real-time, tests are performed on the lot and yield statistics are determined for each of the two or more testers as a function of test yields and the number of tests performed by each tester. Using the yield statistics, a univariate T-statistic for each tester is determined and serves as the basis for comparing each tester with a predetermined threshold statistical range.

Abstract: The invention provides methods and systems for statistically comparing yields among two or more testers in a testing environment where a lot of manufactured articles such as semiconductor wafers are randomly divided among and independently tested by the testers. Generally, in real-time, tests are performed on the lot and yield statistics are determined for each of the two or more testers as a function of test yields and the number of tests performed by each tester. Using the yield statistics, a univariate T-statistic for each tester is determined and serves as the basis for comparing each tester with a predetermined threshold statistical range.