Abstract: A PIN diode comprising an N-type substrate comprising a cathode of the PIN diode and having an intrinsic layer disposed upon the N-type substrate and having a top surface a P-type material disposed upon the top surface of the intrinsic layer comprising an anode of the PIN diode and a N-type material disposed over the sidewall of the cathode and over the sidewall and a portion of the top surface of the intrinsic material that is not occupied by the anode, wherein a horizontal gap is defined between the anode and the cathode through the intrinsic material, the gap being variable in width and/or the horizontal gap is less than the thickness of the intrinsic layer.

Abstract: A method of fabricating a plurality of layers of metal on a substrate depositing a first layer of metal on the substrate; depositing a first layer of planarization material over the substrate and first layer of metal to a depth above the top of the first layer of metal; polishing the first layer of planarization material down to at least the top of the first layer of metal; and depositing a second layer of metal on the first layer of metal and the first layer of planarization material.

Abstract: The invention is a hermetically sealed semiconductor die package wherein a surface of the die can be positioned very close to the hermetic package and a method of fabricating such a package. The invention is particularly suited to hermetically sealed circuit components, such as dies with a light emitting surface or light receiving surface for which it would be desirable to place the light emitting or light receiving surface as close as possible to a transparent window in the package so as to maximize the amount of light that can be transmitted out of the package.

Abstract: A PIN diode comprising an N-type substrate comprising a cathode of the PIN diode and having an intrinsic layer disposed upon the N-type substrate and having a top surface a P-type material disposed upon the top surface of the intrinsic layer comprising an anode of the PIN diode and a N-type material disposed over the sidewall of the cathode and over the sidewall and a portion of the top surface of the intrinsic material that is not occupied by the anode, wherein a horizontal gap is defined between the anode and the cathode through the intrinsic material, the gap being variable in width and/or the horizontal gap is less than the thickness of the intrinsic layer.

Abstract: A light emitting diode package and method of manufacturing the light emitting diode package are provided. The light emitting diode package includes a sub-mount portion and a frame portion extending from the sub-mount portion. The frame portion has angled walls and is configured to receive a light emitting diode therein.

Abstract: An electric component package having a base and a lid, the base and lid defining a hermetically sealed cavity therebetween for accommodating an electric component. The base includes at least one conductive via extending therethrough, allowing control and/or input/output (I/O) ports associated with the electric component to be coupled to the conducive vias to pass signals between the sealed cavity and the exterior of the package without passing through the junction between the base and lid. The electric component package can be produced at the wafer level using conventional silicon wafer integrated circuit manufacturing machinery prior to separating the wafer into a plurality of devices.

Abstract: A light emitting diode package and method of manufacturing the light emitting diode package are provided. The light emitting diode package includes a sub-mount portion and a frame portion extending from the sub-mount portion. The frame portion has angled walls and is configured to receive a light emitting diode therein.

Abstract: An electric component package having a base and a lid, the base and lid defining a hermetically sealed cavity therebetween for accommodating an electric component. The base includes at least one conductive via extending therethrough, allowing control and/or input/output (I/O) ports associated with the electric component to be coupled to the conducive vias to pass signals between the sealed cavity and the exterior of the package without passing through the junction between the base and lid. The electric component package can be produced at the wafer level using conventional silicon wafer integrated circuit manufacturing machinery prior to separating the wafer into a plurality of devices.

Abstract: A Microwave/Millimeter-wave Monolithic Integrated Circuit (MMIC) device including PIN diode and Schottky diode circuits that provides improved performance with a reduced cost of manufacture. The planar, glass-passivated, MMIC device is fabricated in silicon technology and includes mesa isolation between the PIN diode and the Schottky diode. The PIN and Schottky diodes include respective anode regions having different thicknesses and resistivity for implementing the PIN and Schottky diode functions. Further, the Schottky anode region is formed relatively late in a process for fabricating the Si MMIC device to allow the Schottky anode region to be formed in approximately the same plane as the PIN anode region and to allow precise control of the relative thicknesses of the PIN and Schottky anode regions.

Abstract: A method of fabricating a hyperabrupt junction varactor diode structure comprises the steps of forming a non-uniformly doped n-type, hyperabrupt cathode region in a layer of semiconductor material and depositing, by ultra high vacuum chemical vapor deposition (UHVCVD), a p-type anode region onto a surface of the hyperabrupt cathode region. The deposition process is performed at relatively low temperature (i.e., below 600° C.). The anode region and the hyperabrupt cathode are joined at a junction between them such that an impurity concentration level of the hyperabrupt region increases in a direction toward the junction. During the forming step, n-type impurity ions are implanted at an implantation energy level substantially less than 300 keV, preferably between from about 10 to about 70 keV, with the implanted ions being thermally activated at a relatively low temperature (between from about 700 to about 800° C.).

Abstract: A process for fabricating heterolithic microwave integrated circuits. According to one exemplary embodiment, a glass substrate is fused to a silicon wafer, and the silicon wafer is etched to effect silicon pedestals. A glass layer is fused onto and about the silicon mesas and effectively polished to expose the tops of the silicon mesas. The backside glass layer is then polished to render a final thickness of the dielectric layer between the top surface and ground plane. In another exemplary embodiment, a layer of silicon may be selectively etched to form mesas that function as either pedestals or vias. A layer of glass may be fused to the silicon prior to etching. A layer of glass is fused to the silicon substrate and pedestals and planarized through standard polishing techniques. The wafer may be "flipped over" and polished in order to remove a substantial portion of the silicon or glass, depending on which is used. Thereafter, the integrated circuit is fabricated through standard techniques.

Abstract: Silicon conductive vias and pedestals are disclosed for use in microwave integrated circuits. The pedestals are isolated from a ground plane on the bottom surface by glass, while the vias are used to make electrical contact to ground. Electrical circuit elements in the top surface of the integrated circuit are selectively grounded or isolated by the choice of connection to a via or pedestal, respectively.