Patents by Inventor Joel M. Fastenau

Joel M. Fastenau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8617945
    Abstract: A stacking fault and twin blocking barrier for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations. In an embodiment of the present invention, GaSb buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a III-V InSb device layer is formed directly on the GaSb buffer.
    Type: Grant
    Filed: February 3, 2012
    Date of Patent: December 31, 2013
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
  • Publication number: 20120142166
    Abstract: A stacking fault and twin blocking barrier for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations. In an embodiment of the present invention, GaSb buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a III-V InSb device layer is formed directly on the GaSb buffer.
    Type: Application
    Filed: February 3, 2012
    Publication date: June 7, 2012
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W.K. Liu
  • Patent number: 8143646
    Abstract: A stacking fault and twin blocking barrier for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations. In an embodiment of the present invention, GaSb buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a III-V InSb device layer is formed directly on the GaSb buffer.
    Type: Grant
    Filed: August 2, 2006
    Date of Patent: March 27, 2012
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
  • Patent number: 8034675
    Abstract: A composite buffer architecture for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a dual buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations and provide electrical isolation. In an embodiment of the present invention, the material of each buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a GaSb/AlSb buffer is utilized to form an InSb-based quantum well transistor on a silicon substrate.
    Type: Grant
    Filed: October 29, 2010
    Date of Patent: October 11, 2011
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Dmitri Loubychev, Amy W. K. Liu, Joel M. Fastenau
  • Publication number: 20110045659
    Abstract: A composite buffer architecture for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a dual buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations and provide electrical isolation. In an embodiment of the present invention, the material of each buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a GaSb/AlSb buffer is utilized to form an InSb-based quantum well transistor on a silicon substrate.
    Type: Application
    Filed: October 29, 2010
    Publication date: February 24, 2011
    Applicant: INTEL CORPORATION
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Dmitri Loubychev, Amy W. K. Liu, Joel M. Fastenau
  • Patent number: 7851781
    Abstract: Various embodiments provide a buffer layer that is grown over a silicon substrate that provides desirable device isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate.
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: December 14, 2010
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
  • Patent number: 7851780
    Abstract: A composite buffer architecture for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a dual buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations and provide electrical isolation. In an embodiment of the present invention, the material of each buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a GaSb/AlSb buffer is utilized to form an InSb-based quantum well transistor on a silicon substrate.
    Type: Grant
    Filed: August 2, 2006
    Date of Patent: December 14, 2010
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Dmitri Loubychev, Amy W. K. Liu, Joel M. Fastenau
  • Patent number: 7790536
    Abstract: A device grade III-V quantum well structure and method of manufacture is described. Embodiments of the present invention enable III-V InSb quantum well device layers with defect densities below 1×108cm?2 to be formed. In an embodiment of the present invention, a delta doped layer is disposed on a dopant segregation barrier in order to confine delta dopant within the delta doped layer and suppress delta dopant surface segregation.
    Type: Grant
    Filed: August 10, 2009
    Date of Patent: September 7, 2010
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Aaron A. Budrevich, Dmitri Loubychev, Jack T. Kavalieros, Suman Datta, Joel M. Fastenau, Amy W. K. Liu
  • Patent number: 7687799
    Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may include forming a GaSb nucleation layer on a substrate, forming a Ga(Al)AsSb buffer layer on the GaSb nucleation layer, forming an In0.52Al0.48As bottom barrier layer on the Ga(Al)AsSb buffer layer, and forming a graded InxAl1-xAs layer on the In0.52Al0.48As bottom barrier layer thus enabling the fabrication of low defect, device grade InGaAs based quantum well structures.
    Type: Grant
    Filed: June 19, 2008
    Date of Patent: March 30, 2010
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Peter G. Tolchinsky, Loren A. Chow, Dmitri Loubychev, Joel M. Fastenau, Amy W. K. Liu
  • Publication number: 20090315018
    Abstract: Methods and associated structures of forming a microelectronic device are described. Those methods may include forming a GaSb nucleation layer on a substrate, forming a Ga(Al)AsSb buffer layer on the GaSb nucleation layer, forming an In0.52Al0.48As bottom barrier layer on the Ga(Al)AsSb buffer layer, and forming a graded InxAl1-xAs layer on the In0.52Al0.48As bottom barrier layer thus enabling the fabrication of low defect, device grade InGaAs based quantum well structures.
    Type: Application
    Filed: June 19, 2008
    Publication date: December 24, 2009
    Inventors: Mantu K. Hudait, Peter G. Tolchinsky, Loren A. Chow, Dmitri Loubychev, Joel M. Fastenau, Amy W.K. Liu
  • Publication number: 20090298266
    Abstract: A device grade III-V quantum well structure and method of manufacture is described. Embodiments of the present invention enable III-V InSb quantum well device layers with defect densities below 1×108 cm?2 to be formed. In an embodiment of the present invention, a delta doped layer is disposed on a dopant segregation barrier in order to confine delta dopant within the delta doped layer and suppress delta dopant surface segregation.
    Type: Application
    Filed: August 10, 2009
    Publication date: December 3, 2009
    Inventors: Mantu K. Hudait, Aaron A. Budrevich, Dmitri Loubychev, Jack T. Kavalieros, Suman Datta, Joel M. Fastenau, Amy W. Liu
  • Patent number: 7601980
    Abstract: A device grade III-V quantum well structure and method of manufacture is described. Embodiments of the present invention enable III-V InSb quantum well device layers with defect densities below 1×108 cm?2 to be formed. In an embodiment of the present invention, a delta doped layer is disposed on a dopant segregation barrier in order to confine delta dopant within the delta doped layer and suppress delta dopant surface segregation.
    Type: Grant
    Filed: December 29, 2006
    Date of Patent: October 13, 2009
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Aaron A. Budrevich, Dmitri Loubychev, Jack T. Kavalieros, Suman Datta, Joel M. Fastenau, Amy W. K. Liu
  • Publication number: 20090218596
    Abstract: Various embodiments provide a buffer layer that is grown over a silicon substrate that provides desirable device isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate.
    Type: Application
    Filed: February 13, 2009
    Publication date: September 3, 2009
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
  • Patent number: 7573059
    Abstract: A device grade III-V quantum well structure formed on a silicon substrate using a composite buffer architecture and the method of manufacture is described. Embodiments of the present invention enable III-V InSb quantum well device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, an InSb quantum well layer is sandwiched between two larger band gap barrier layers. In an embodiment of the present invention, InSb quantum well layer is strained. In a specific embodiment, the two larger band gap barrier layers are graded.
    Type: Grant
    Filed: August 2, 2006
    Date of Patent: August 11, 2009
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Dmitri Loubychev, Joel M. Fastenau, Amy W. K. Liu
  • Patent number: 7566898
    Abstract: In one embodiment, the present invention includes an apparatus for forming a transistor that includes a silicon (Si) substrate, a dislocation filtering buffer formed over the Si substrate having a first buffer layer including gallium arsenide (GaAs) nucleation and buffer layers and a second buffer layer including a graded indium aluminium arsenide (InAlAs) buffer layer, a lower barrier layer formed on the second buffer layer formed of InAlAs, and a strained quantum well (QW) layer formed on the lower barrier layer of indium gallium arsenide (InGaAs). Other embodiments are described and claimed.
    Type: Grant
    Filed: March 1, 2007
    Date of Patent: July 28, 2009
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Dmitri Loubychev, Suman Datta, Robert Chau, Joel M. Fastenau, Amy W. K. Liu
  • Patent number: 7494911
    Abstract: Various embodiments proved a buffer layer that is grown over a silicon substrate that provides desirable isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate.
    Type: Grant
    Filed: September 27, 2006
    Date of Patent: February 24, 2009
    Assignee: Intel Corporation
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
  • Publication number: 20080210927
    Abstract: In one embodiment, the present invention includes an apparatus for forming a transistor that includes a silicon (Si) substrate, a dislocation filtering buffer formed over the Si substrate having a first buffer layer including gallium arsenide (GaAs) nucleation and buffer layers and a second buffer layer including a graded indium aluminium arsenide (InAlAs) buffer layer, a lower barrier layer formed on the second buffer layer formed of InAlAs, and a strained quantum well (QW) layer formed on the lower barrier layer of indium gallium arsenide (InGaAs). Other embodiments are described and claimed.
    Type: Application
    Filed: March 1, 2007
    Publication date: September 4, 2008
    Inventors: Mantu K. Hudait, Dmitri Loubychev, Suman Datta, Robert Chau, Joel M. Fastenau, Amy W. K. Liu
  • Publication number: 20080157058
    Abstract: A device grade III-V quantum well structure and method of manufacture is described. Embodiments of the present invention enable III-V InSb quantum well device layers with defect densities below 1×108 cm?2 to be formed. In an embodiment of the present invention, a delta doped layer is disposed on a dopant segregation barrier in order to confine delta dopant within the delta doped layer and suppress delta dopant surface segregation.
    Type: Application
    Filed: December 29, 2006
    Publication date: July 3, 2008
    Inventors: Mantu K. Hudait, Aaron A. Budrevich, Dmitri Loubychev, Jack T. Kavalieros, Suman Datta, Joel M. Fastenau, Amy W. K. Liu
  • Publication number: 20080073639
    Abstract: A device grade III-V quantum well structure formed on a silicon substrate using a composite buffer architechture and the method of manufacture is described. Embodiments of the present invention enable III-V InSb quantum well device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, an InSb quantum well layer is sandwiched between two larger band gap barrier layers. In an embodiment of the present invention, InSb quantum well layer is strained. In a specific embodiment, the two larger band gap barrier layers are graded.
    Type: Application
    Filed: August 2, 2006
    Publication date: March 27, 2008
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Dmitri Loubychev, Joel M. Fastenau, Amy W.K. Liu
  • Publication number: 20080076235
    Abstract: Various embodiments proved a buffer layer that is grown over a silicon substrate that provides desirable isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate.
    Type: Application
    Filed: September 27, 2006
    Publication date: March 27, 2008
    Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu