Patents by Inventor Joerg Dielmann

Joerg Dielmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR THERMOCOUPLE INSTALLATION OR REPLACEMENT IN A SUBSTRATE SUPPORT
    Publication number: 20120241089
    Abstract: An apparatus and method for one or more externally mounted temperature sensors in a substrate support utilized in a chemical vapor deposition (CVD) chamber is provided. In one embodiment, a substrate support for a vacuum chamber is provided. The substrate support comprises a body having a substrate receiving surface and an opposing bottom surface, a support stem coupled to and extending away from the bottom surface, one or more thermal control devices embedded within the body, at least one temperature sensor interfaced with the bottom surface of the body, and a removable hermitic enclosure fastened to the second side of the body and covering the at least one temperature sensor.
    Type: Application
    Filed: January 27, 2012
    Publication date: September 27, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Joerg Dielmann, Reiner Ruediger