Patents by Inventor Joerg Kerschbaumer

Joerg Kerschbaumer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Target assembly for safe and economic evaporation of brittle materials
    Patent number: 11158491
    Abstract: The present invention discloses a target assembly which allows safe, fracture-free and economic operation of target materials with low fracture toughness and/or bending strength during arc evaporation processes as well as in sputtering processes. The present invention discloses a target assembly for PVD processes, comprising a target, and a target holding device (20), characterized in that the target (10) comprises a first bayonet lock and the target holding device (20) comprises a counterbody for the first bayonet lock of the target and a second bayonet lock for engaging the target assembly in the cooling means of the deposition chamber.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: October 26, 2021
    Assignee: Oerlikon Surface Solutions AG, Pfäffikon
    Inventors: Joerg Kerschbaumer, Hamid Bolvardi, Siegfried Krassnitzer, Markus Esselbach
  • Centering of a plate in a holder both at room temperatures and at higher temperatures
    Patent number: 9564300
    Abstract: A system that has a plate with a holder, in which the plate is centered in the holder both at room temperatures and at higher temperatures, independently of the thermal expansion of the plate and the holder, and in which the plate can freely expand in the holder at higher temperatures.
    Type: Grant
    Filed: April 7, 2014
    Date of Patent: February 7, 2017
    Assignee: Oerlikon Surface Solutions AG, Pfäffikon
    Inventor: Joerg Kerschbaumer
  • Sputtering target having increased power compatibility
    Patent number: 9536714
    Abstract: A plate-centering system that has a plate with a holder, in which the plate is centered in the holder both at room temperature and at higher temperatures, independently of the thermal expansion of the plate and the holder, and the plate can freely expand in the holder at higher temperatures. The invention relates in particular to a target having a frame-shaped target mount, which is very well suited for use in a coating source for high power pulsed magnetron sputtering of the target.
    Type: Grant
    Filed: April 7, 2014
    Date of Patent: January 3, 2017
    Assignee: OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
    Inventors: Siegfried Krassnitzer, Juerg Hagmann, Joerg Kerschbaumer
  • CENTERING OF A PLATE IN A HOLDER BOTH AT ROOM TEMPERATURES AND AT HIGHER TEMPERATURES
    Publication number: 20160071706
    Abstract: A system that has a plate with a holder, in which the plate is centered in the holder both at room temperatures and at higher temperatures, independently of the thermal expansion of the plate and the holder, and in which the plate can freely expand in the holder at higher temperatures.
    Type: Application
    Filed: April 7, 2014
    Publication date: March 10, 2016
    Inventor: Joerg Kerschbaumer
  • SPUTTERING TARGET HAVING INCREASED POWER COMPATIBILITY
    Publication number: 20160064201
    Abstract: A plate-centering system that has a plate with a holder, in which the plate is centered in the holder both at room temperature and at higher temperatures, independently of the thermal expansion of the plate and the holder, and the plate can freely expand in the holder at higher temperatures. The invention relates in particular to a target having a frame-shaped target mount, which is very well suited for use in a coating source for high power pulsed magnetron sputtering of the target.
    Type: Application
    Filed: April 7, 2014
    Publication date: March 3, 2016
    Inventors: Siegfried Krassnitzer, Juerg Hagmann, Joerg Kerschbaumer
  • Cover for a roller
    Patent number: 8826851
    Abstract: A cover for a roller having at least one roller (2) for transporting a substrate (1) in a deposition system and at least one cover means (6), wherein the roller is retractable away from the substrate and the cover means is adapted for at least partly covering the retracted roller against contamination by a substance present in the deposition system. The cover for a roller has the advantage that the uptime of the deposition system is increased.
    Type: Grant
    Filed: July 14, 2009
    Date of Patent: September 9, 2014
    Assignee: Oberlikon Solar AG, Trubbach
    Inventors: Mark Andreas, Joerg Kerschbaumer, Stefan Schneider, Arno Zindel
  • COVER FOR A ROLLER
    Publication number: 20100016136
    Abstract: A cover for a roller having at least one roller (2) for transporting a substrate (1) in a deposition system and at least one cover means (6), wherein the roller is retractable away from the substrate and the cover means is adapted for at least partly covering the retracted roller against contamination by a substance present in the deposition system. The cover for a roller has the advantage that the uptime of the deposition system is increased.
    Type: Application
    Filed: July 14, 2009
    Publication date: January 21, 2010
    Applicant: Oerlikon Solar IP AG, Trubbach
    Inventors: Mark Andreas, Joerg Kerschbaumer, Stefan Schneider, Arno Zindel