Patents by Inventor Joerg Pitschke

Joerg Pitschke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for cleaning lithographic apparatus
    Publication number: 20060243300
    Abstract: A method is provided for cleaning a photo-mask by placing the photo-mask in an evacuated chamber for a certain period of time.
    Type: Application
    Filed: April 27, 2005
    Publication date: November 2, 2006
    Inventors: Patrick Klingbeil, Joerg Pitschke, Anja Bonness