Patents by Inventor Joerg Pollack

Joerg Pollack has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum chamber arrangement and method for processing a substrate
    Patent number: 11244845
    Abstract: A vacuum chamber having a vacuum chamber; at least one processing region arranged in the vacuum chamber; and a substrate holding arrangement for transporting and/or positioning a substrate or multiple substrates in the processing region, wherein the substrate holding arrangement has: a first drive train with a first substrate holder, the first substrate holder being configured to rotatably hold one or more substrates, a second drive train with a first support arm, wherein the first substrate holder is held rotatably by the first support arm, a third drive train with a second substrate holder, the second substrate holder being configured for rotatably holding one or more substrates, and a fourth drive train with a second support arm, wherein the second substrate holder is held rotatably by the second support arm, and wherein the first, second, third and fourth drive trains are each configured to be controllable independently of one another.
    Type: Grant
    Filed: September 26, 2018
    Date of Patent: February 8, 2022
    Assignee: VON ARDENNE ASSET GMBH & CO. KG
    Inventors: Joerg Pollack, Lutz Gottsmann, Georg Laimer
  • VACUUM CHAMBER ARRANGEMENT AND METHOD FOR PROCESSING A SUBSTRATE
    Publication number: 20190093213
    Abstract: A vacuum chamber having a vacuum chamber; at least one processing region arranged in the vacuum chamber; and a substrate holding arrangement for transporting and/or positioning a substrate or multiple substrates in the processing region, wherein the substrate holding arrangement has: a first drive train with a first substrate holder, the first substrate holder being configured to rotatably hold one or more substrates, a second drive train with a first support arm, wherein the first substrate holder is held rotatably by the first support arm, a third drive train with a second substrate holder, the second substrate holder being configured for rotatably holding one or more substrates, and a fourth drive train with a second support arm, wherein the second substrate holder is held rotatably by the second support arm, and wherein the first, second, third and fourth drive trains are each configured to be controllable independently of one another.
    Type: Application
    Filed: September 26, 2018
    Publication date: March 28, 2019
    Inventors: Joerg Pollack, Lutz Gottsmann, Georg Laimer