Abstract: A substrate transporting apparatus including a carrier that is configured to support a substrate to be processed. A plurality of holes are disposed within the carrier, each hole extending from a first surface to a second surface of the carrier, the plurality of holes including at least a first hole and a second hole. A first bearing device is disposed in the first hole, the first bearing device including a first shaft, a first head, and an internal opening extending an entire length of the first shaft and the first head. The second hole is either (i) is an open hole without a bearing device disposed therein, or (ii) has a second bearing device disposed therein, the second bearing device including a second shaft and a second head without an internal opening disposed through the second shaft.

Abstract: Photovoltaic module comprising a transparent substrate (1), a transparent front electrode layer (2), a semiconducting layer (3) of microcrystalline or micromorphous silicon and a rear electrode layer (4), said layers structured to form cells (C1, C2, C3) electrically separated by separating lines (5, 6, 7) and electrically connected in series. A laser beam (14) is used to generate at least in rear electrode layer (4) separating line sections (18, 18?) interconnected to form continuous separating lines (7) by connecting sections (19, 20) extending at an angle (?) to separating line sections (18, 18?).