Abstract: The invention relates to a method for inspecting a surface of a wafer with regions of different detection sensitivity. For this purpose, an image of the selected surface of the wafer is acquired using a detector. At least one region handled with a different detection sensitivity than the rest of the wafer may be defined on the surface of the wafer by means of an input unit. The detection sensitivity set for the regions is a percentage less than the detection sensitivity for the surface of the wafer without the regions with the different detection sensitivity.

Abstract: The invention relates to a method for inspecting a surface of a wafer with regions of different detection sensitivity. For this purpose, an image of the selected surface of the wafer is acquired using a detector. At least one region handled with a different detection sensitivity than the rest of the wafer may be defined on the surface of the wafer by means of an input unit. The detection sensitivity set for the regions is a percentage less than the detection sensitivity for the surface of the wafer without the regions with the different detection sensitivity.

Abstract: The examination of a wafer (10) has until now been implemented by means of wafer-to-wafer comparison of the entire wafer (10). In order to ensure timely detection of defects, or the development of defects, on a wafer (10) wafer-to-wafer comparison is limited to particular comparison regions (22) selected by the user.

Abstract: A mine roof support structure includes a floor skid, a supporting shield pivotally connected thereto by a pair of rocker arms forming a lemniscate guide, a roof cap pivotally connected at a roof cap joint to the shield, and hydraulic props supporting the roof cap. A hydraulic actuator is pivotally connected at opposite ends to the skid and to one of the arms, and the other of the rocker arms is disposed nearer the coal-face end of the support than the one arm. Such other arm is longitudinally adjustable and is pivotally connected at opposite ends to the skid and to the shield. This other arm is so constructed that its opposite ends may be adjusted relative to one another to enable the cap and the roof cap joint to follow a lemniscate path during settling of the roof and to follow a circular arc during a lowering of the cap toward the skid upon actuation of the hydraulic actuator.