Abstract: A bearing module for supporting a rapidly rotatable shaft of a vacuum pump includes a rolling bearing for supporting rotatably the shaft, a reservoir for a lubricant having an element forming a sliding contact with a delivery structure supported on the shaft for delivery of the lubricant in the rolling bearing under action of centrifugal forces generated during rotation of the shaft, and a radial delivery element provided on a side of the rolling bearing opposite a side of the bearing at which the delivery structure is located, for returning the lubricant to the reservoir.

Abstract: A vacuum housing includes a cylindrical section, a flange, and a ring arranged concentrically with the cylindrical section and forming part of the flange, with the ring being formed of a harder material than the remaining of the housing, and having an annular knife edge extending in an axial direction and in a direction away from the cylindrical section, with the knife edge forming part of the flange surface.

Abstract: A bearing module for supporting a rapidly rotatable shaft of a vacuum pump includes a rolling bearing for supporting rotatably the shaft, a reservoir for a lubricant having an element forming a sliding contact with a delivery structure supported on the shaft for delivery of the lubricant in the rolling bearing under action of centrifugal forces generated during rotation of the shaft, and a radial delivery element provided on a side of the rolling bearing opposite a side of the bearing at which the delivery structure is located, for returning the lubricant to the reservoir.

Abstract: A turbomolecular pump includes a plurality of rotor and stator discs arranged alternatively one behind another and producing together a pumping effect, a plurality of spacer rings for retaining the stator discs at a distance from each other; and connection elements for fixedly connecting adjacent spacer rings with each other, so that the spacer rings together provide for securing and centering of the stator discs, taking over the function of a pump housing that is eliminated.

Abstract: A vacuum housing includes a cylindrical section, a flange, and a ring arranged concentrically with the cylindrical section and forming part of the flange, with the ring being formed of a harder material than the remaining of the housing, and having an annular knife edge extending in an axial direction and in a direction away from the cylindrical section, with the knife edge forming part of the flange surface.

Abstract: A gas friction pump, comprising stationary pump-active components (14) and rotatable pump-active components (15) secured on a rotatable rotor shaft (4), wherein the rotor shaft is supported with a bearing (5) at the high-vacuum-side end and a bearing arrangement at a fore-vacuum side end, characterized in that the high-vacuum side bearing is formed as a conventional bearing, and the fore-vacuum bearing arrangement contains at least one gas bearing. In an advantageous embodiment, the gas bearing is formed as a module and can be brought in engagement with a cylindrical portion of the housing and secured therein.

Abstract: A gas friction pump includes stationary (6) and rotatable (5) pump-active elements secured on a rotor shaft (4) and forming with the rotor shaft components of the rotor, with the rotor shaft (4) being supported by two, spaced from each other, radial bearings (8, 9), of which one is located closer to the gravity center of the rotor than the other, and an axial bearing (16), and with the radial bearing (9), which is located closer to the gravity center of the rotor, being formed as a gas bearing, and another radial bearing (8) being formed as a non-gas bearing.

Abstract: A gas friction pump including stationary (6) and rotatable (5), secured on a rotatable rotor shaft (4), pump-active elements, wherein the rotor shaft (4) and the rotatable pump-active elements (5) form components of the rotor, and the rotor shaft (4) is supported by two, spaced from each other, radial bearings (8, 9), of which one is located closer to the gravity center of the rotor than the other, and an axial bearing (16), characterized in that the radial bearing (9), which is located closer to the gravity center of the rotor, is formed as a gas bearing. In an advantageous embodiment, the gas bearings are formed as modules and can be brought into engagement with a cylindrical housing section and secured.

Abstract: A gas friction pump, comprising stationary pump-active components (14) and rotatable pump-active components (15) secured on a rotatable rotor shaft (4), wherein the rotor shaft is supported with a bearing (5) at the high-vacuum-side end and a bearing arrangement at a fore-vacuum side end, characterized in that the high-vacuum side bearing is formed as a conventional bearing, and the fore-vacuum bearing arrangement contains at least one gas bearing. In an advantageous embodiment, the gas bearing is formed as a module and can be brought in engagement with a cylindrical portion of the housing and secured therein.

Abstract: A turbomolecular pump includes a plurality of rotor and stator discs arranged alternatively one behind another and producing together a pumping effect, a plurality of spacer rings for retaining the stator discs at a distance from each other; and connection elements for fixedly connecting adjacent spacer rings with each other, so that the spacer rings together provide for securing and centering of the stator discs, taking over the function of a pump housing that is eliminated.

Abstract: A turbomolecular pump including a cylindrical housing, and rotor and stator discs arranged in the housing and cooperating with each other to produce a pumping effect, with the cylindrical housing being formed of at least two housing parts separated along a cylinder axis and each formed, together with respective separated sections of the stator discs, as a one-piece unit.