Patents by Inventor Joerg Stodolka

Joerg Stodolka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Particle beam microscopy system and method for operating the same
    Patent number: 8507854
    Abstract: A particle beam system 1 for cleaning itself comprises an irradiation system to direct electromagnetic radiation onto the surfaces to be cleaned and a supply system 61 to supply a precursor gas to the interior of the vacuum chamber 11 of the particle beam system 1. The precursor gas is activated in a vicinity of the surfaces to be cleaned and is converted into a reaction gas which reacts with the contaminants present on the irradiated surfaces such that said contaminants may be pumped out then.
    Type: Grant
    Filed: July 13, 2010
    Date of Patent: August 13, 2013
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Wolfram Buehler, Holger Doemer, Matthias Lang, Joerg Stodolka, Peter Roediger, Emmerich Bertagnolli, Heinz Wanzenboeck
  • Particle beam microscopy system and method for operating the same
    Publication number: 20110079711
    Abstract: A particle beam system 1 for cleaning itself comprises an irradiation system to direct electromagnetic radiation onto the surfaces to be cleaned and a supply system 61 to supply a precursor gas to the interior of the vacuum chamber 11 of the particle beam system 1. The precursor gas is activated in a vicinity of the surfaces to be cleaned and is converted into a reaction gas which reacts with the contaminants present on the irradiated surfaces such that said contaminants may be pumped out then.
    Type: Application
    Filed: July 13, 2010
    Publication date: April 7, 2011
    Inventors: Wolfram Buehler, Holger Doemer, Matthias Lang, Joerg Stodolka, Peter Roediger, Emmerich Bertagnolli, Heinz Wanzenboeck