Patents by Inventor Joerg Zimmermann

Joerg Zimmermann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180261854
    Abstract: A fuel cell system with planar manifold having at least one fuel cell assembly with a first side and a second side; a plurality of anodes on the first side; a plurality of cathodes on the second side; ion-conducting electrolyte between the first and second sides; a fluid manifold assembly fluidly connected to the first side. In the planar manifold a first barrier layer provides at least one inlet port in fluid communication with a hydrogen source, and at least one outlet port to remove any unreacted hydrogen and byproducts from the first side; a plurality of conduit layers, on at least one of which is disposed one or more channels fluidly connected to the at least one inlet port and one of which is fluidly connected to the at least one outlet port; and, a second barrier layer disposed above the plurality of conduit layers containing a plurality of perforations affixed to the first side to supply hydrogen gas.
    Type: Application
    Filed: May 8, 2018
    Publication date: September 13, 2018
    Applicant: Intelligent Energy Limited
    Inventors: Jeremy SCHROOTEN, Paul SOBEJKO, Joerg ZIMMERMANN, Isabelle DEPATIE, Simon FOSTER, Christopher KIRK, Vincent FAUCHEUX
  • Patent number: 10056625
    Abstract: An electrochemical cell system includes a fluid manifold having a layered structure. The fluid manifold includes at least one conduit layer having a first side and a second side. The at least one conduit later has at least one conduit channel.
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: August 21, 2018
    Assignee: INTELLIGENT ENERGY LIMITED
    Inventors: Jeremy Schrooten, Paul Sobejko, Joerg Zimmermann, Isabelle Depatie
  • Patent number: 9785052
    Abstract: A method of reducing image placement errors in a microlithographic projection exposure apparatus includes providing a mask, a light sensitive layer and a microlithographic projection exposure apparatus which images features of the mask onto the light sensitive surface using projection light. Subsequently, image placement errors associated with an image of the features formed on the light sensitive surface are determined either by simulation or metrologically. Then an input state of polarization of the projection light is changed to an elliptical output state of polarization which is selected such that the image placement errors are reduced.
    Type: Grant
    Filed: March 11, 2013
    Date of Patent: October 10, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Johannes Ruoff, Jens Timo Neumann, Joerg Zimmermann, Dirk Hellweg, Dirk Juergens
  • Patent number: 9728796
    Abstract: Embodiments of the present invention relate to a fluid distribution system. The system may include one or more electrochemical cell layers, a bulk distribution manifold having an inlet, a cell layer feeding manifold in direct fluidic contact with the electrochemical cell layer and a separation layer that separates the bulk distribution manifold from the cell feeding manifold, providing at least two independent paths for fluid to flow from the bulk distribution manifold to the cell feeding manifold.
    Type: Grant
    Filed: July 14, 2015
    Date of Patent: August 8, 2017
    Assignee: Intelligent Energy Limited
    Inventors: Gerard F. McLean, Joerg Zimmermann, Jeremy Schrooten, Paul Sobejko
  • Publication number: 20170212426
    Abstract: In a method for predicting at least one illumination parameter for evaluating an illumination setting for illuminating an object field of a projection exposure apparatus, illumination parameters are measured at a number of calibration settings, correction terms for prediction values of the illumination parameters are determined from the measured values, and then at least one illumination parameter of at least one illumination setting, which is not contained in the set of n calibration settings, is predicted.
    Type: Application
    Filed: April 7, 2017
    Publication date: July 27, 2017
    Inventors: Ralf Gehrke, Christoph Hennerkes, Wolfgang Hoegele, Joerg Zimmermann
  • Patent number: 9690203
    Abstract: Method for setting an illumination setting in an illumination optical unit comprising at least one controllable correction device, which includes a multiplicity of adjustable correction elements for influencing the transmission, wherein the illumination setting is varied for adapting a predetermined imaging parameter in the region of an image field.
    Type: Grant
    Filed: January 6, 2015
    Date of Patent: June 27, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Joerg Zimmermann, Ralf Stuetzle, Paul Graeupner, Olaf Conradi
  • Patent number: 9645503
    Abstract: A collector for a projection exposure apparatus for microlithography comprises a plurality of reflective sections which are embodied and arranged in such a way that they can be impinged upon during the focusing of radiation from a first focus into a second focus with angles of impingement in a predefined angular spectrum.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: May 9, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ingo Saenger, Joerg Zimmermann, Daniel Kraehmer, Johannes Ruoff, Martin Meier, Frank Schlesener, Christoph Hennerkes, Wolfgang Singer
  • Patent number: 9551941
    Abstract: The invention relates to an illumination system for an EUV lithography device, comprising: a first facet mirror having facet elements that reflect EUV radiation, and a second facet mirror having facet elements for reflecting the EUV radiation reflected by the first facet mirror onto an illumination field. At least one of the facet elements of the first facet mirror or of the second facet mirror is designed as a diffractive optical element for diffracting the EUV radiation. In particular, at least one of the facet elements of the second facet mirror is designed as a diffractive optical element for illuminating only a part of the illumination field. The invention also relates to an EUV lithography device comprising such an illumination system, and to a facet mirror comprising at least one diffractive facet element.
    Type: Grant
    Filed: July 10, 2015
    Date of Patent: January 24, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Johannes Ruoff, Ingo Saenger, Joerg Zimmermann, Daniel Kraehmer, Christoph Hennerkes, Frank Schlesener
  • Patent number: 9507269
    Abstract: An illumination optical unit for projection lithography has a first polarization mirror device to reflect and polarize of illumination light. A second mirror device, which is disposed downstream of the polarization mirror device reflects an illumination light beam. At least one drive device is operatively connected to at least one of the two mirror devices. The two mirror devices are displaceable relative to one another via the drive device between a first relative position, which leads to a first beam geometry of the illumination light beam after reflection at the second mirror device, and a second relative position, which leads to a second beam geometry of the illumination light beam after reflection at the second mirror device, which is different from the first beam geometry. This results in a flexible predefinition of different illumination geometries, in particular of different illumination geometries with rotationally symmetrical illumination.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: November 29, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Christoph Hennerkes, Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener
  • Patent number: 9500956
    Abstract: The disclosure relates to optical systems of a microlithographic projection exposure apparatus, and to a microlithographic exposure method. According to an aspect of the disclosure, an optical system has a light source, a ray-splitting optical element, which splits a light ray incident on this element when the projection exposure apparatus is in operation into a first partial ray and a second partial ray, with the first and the second partial ray having mutually orthogonal polarization directions, and at least one ray-deflecting optical element for generating a desired polarized illumination setting from the first partial ray and the second partial ray, wherein the ray-splitting optical element is arranged such that light incident on this ray-splitting optical element when the projection exposure apparatus is in operation has a degree of polarization of less than one.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: November 22, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener, Christoph Hennerkes
  • Patent number: 9323156
    Abstract: An optical system of a microlithographic projection exposure apparatus includes at least one mirror arrangement having a plurality of mirror elements which are displaceable independently of each other for altering an angular distribution of the light reflected by the mirror arrangement. The optical system also includes a polarization-influencing optical arrangement including a first lambda/2 plate and at least one additional lambda/2 plate.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: April 26, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ingo Saenger, Olaf Dittmann, Joerg Zimmermann
  • Patent number: 9263752
    Abstract: Fluid coupling assemblies and methods are discussed. The fluid coupling assemblies include a first coupling member, a second coupling member magnetically engageable with the first coupling member, and a seal member disposed between a portion of the first coupling member and a portion of the second coupling member. A magnetic engagement of the first coupling member and the second coupling member unseals a fluid flow path therebetween. In certain examples, the first coupling member is sealed by a valve member and the second coupling member includes an activation member. When engaged, the valve member is moved from a closed position to an open position by the activation member, thereby unsealing the fluid flow path. A magnetic force between the first coupling member and the second coupling member can be chosen such that the members disengage when a predetermined fluid flow path pressure is reached.
    Type: Grant
    Filed: January 18, 2011
    Date of Patent: February 16, 2016
    Assignee: Intelligent Energy Limited
    Inventors: Joerg Zimmermann, Jeremy Schrooten
  • Publication number: 20160043416
    Abstract: An electrochemical cell system includes a fluid manifold having a layered structure. The fluid manifold includes at least one conduit layer having a first side and a second side. The at least one conduit later has at least one conduit channel.
    Type: Application
    Filed: October 20, 2015
    Publication date: February 11, 2016
    Applicant: INTELLIGENT ENERGY LIMITED
    Inventors: Jeremy Schrooten, Paul Sobejko, Joerg Zimmermann, Isabelle Depatie
  • Publication number: 20160004164
    Abstract: The invention relates to an illumination system for an EUV lithography device, comprising: a first facet mirror having facet elements that reflect EUV radiation, and a second facet mirror having facet elements for reflecting the EUV radiation reflected by the first facet mirror onto an illumination field. At least one of the facet elements of the first facet mirror or of the second facet mirror is designed as a diffractive optical element for diffracting the EUV radiation. In particular, at least one of the facet elements of the second facet mirror is designed as a diffractive optical element for illuminating only a part of the illumination field. The invention also relates to an EUV lithography device comprising such an illumination system, and to a facet mirror comprising at least one diffractive facet element.
    Type: Application
    Filed: July 10, 2015
    Publication date: January 7, 2016
    Inventors: Johannes Ruoff, Ingo Saenger, Joerg Zimmermann, Daniel Kraehmer, Christoph Hennerkes, Frank Schlesener
  • Patent number: 9214687
    Abstract: A electrochemical cell system includes a fluid manifold having a layered structure. The fluid manifold includes at least one conduit layer having a first side and a second side. The at least one conduit layer has at least one conduit channel.
    Type: Grant
    Filed: January 30, 2012
    Date of Patent: December 15, 2015
    Assignee: Intelligent Energy Limited
    Inventors: Jeremy Schrooten, Paul Sobejko, Joerg Zimmermann, Isabelle Depatie
  • Publication number: 20150318566
    Abstract: Embodiments of the present invention relate to a fluid distribution system. The system may include one or more electrochemical cell layers, a bulk distribution manifold having an inlet, a cell layer feeding manifold in direct fluidic contact with the electrochemical cell layer and a separation layer that separates the bulk distribution manifold from the cell feeding manifold, providing at least two independent paths for fluid to flow from the bulk distribution manifold to the cell feeding manifold.
    Type: Application
    Filed: July 14, 2015
    Publication date: November 5, 2015
    Applicant: INTELLIGENT ENERGY LIMITED
    Inventors: Gerard F. McLean, Joerg Zimmermann, Jeremy Schrooten, Paul Sobejko
  • Patent number: 9115232
    Abstract: The invention relates to comb polymers made from maleic acid or derivatives thereof, allyl ethers, and vinyl acetate, and the preparation thereof by free-radical polymerization at a reaction temperature of 10° C. to 50° C. The invention relates further to the use of such comb polymers to improve the workability of hydraulically setting compositions.
    Type: Grant
    Filed: December 20, 2011
    Date of Patent: August 25, 2015
    Assignee: SIKA TECHNOLOGY AG
    Inventors: Ueli Sulser, Lukas Frunz, Joerg Zimmermann
  • Patent number: 9118042
    Abstract: Embodiments of the present invention relate to a fluid distribution system. The system may include one or more electrochemical cell layers, a bulk distribution manifold having an inlet, a cell layer feeding manifold in direct fluidic contact with the electrochemical cell layer and a separation layer that separates the bulk distribution manifold from the cell feeding manifold, providing at least two independent paths for fluid to flow from the bulk distribution manifold to the cell feeding manifold.
    Type: Grant
    Filed: February 21, 2012
    Date of Patent: August 25, 2015
    Assignee: Intelligent Energy Limited
    Inventors: Gerard F. McLean, Joerg Zimmermann, Jeremy Schrooten, Paul Sobejko
  • Patent number: 9096470
    Abstract: The invention relates to comb polymers of maleic acid or derivatives thereof, allyl ethers and (meth)acrylic acid or derivatives thereof, and to the preparation thereof by free radical polymerization at a reaction temperature of 10° C. to 50° C. The invention further relates to the use of such comb polymers for improving the processability of hydraulically setting compositions.
    Type: Grant
    Filed: May 7, 2012
    Date of Patent: August 4, 2015
    Assignee: SIKA TECHNOLOGY AG
    Inventors: Ueli Sulser, Lukas Frunz, Joerg Zimmermann
  • Patent number: 9092036
    Abstract: Pressure regulator assemblies that are overall small in size, have a thin form factor, can be repeatedly manufactured at relatively low cost and which can avoid the use of poppet valves, pivots, sliding members or rubber and metal diaphragms are disclosed. These pressure regulator assemblies can find utility in small or micro-fluidic applications, such as fuel cell systems, for example. The fluid to be regulated by the assemblies can be a liquid or gas.
    Type: Grant
    Filed: April 15, 2011
    Date of Patent: July 28, 2015
    Assignee: Intelligent Energy Limited
    Inventor: Joerg Zimmermann