Patents by Inventor Joern Plagmann

Joern Plagmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10217644
    Abstract: In various aspects of the disclosure, a semiconductor device including at least one semiconductor die; a dielectric layer adjoining the semiconductor die; geometric structures formed in the dielectric layer; and a conductive layer deposited over the dielectric layer, wherein the conductive layer is at least partially located over the geometric structures.
    Type: Grant
    Filed: July 24, 2012
    Date of Patent: February 26, 2019
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Thomas Grille, Ursula Hedenig, Joern Plagmann, Helmut Schoenherr, Ralph Muth
  • Patent number: 8786085
    Abstract: One or more embodiments relate to a semiconductor structure, comprising: a barrier layer overlying a workpiece surface; a seed layer overlying the barrier layer; an inhibitor layer overlying said seed layer, the inhibitor layer having a opening exposing a portion of the seed layer, and a fill layer overlying the exposed portion of the seed layer.
    Type: Grant
    Filed: November 8, 2012
    Date of Patent: July 22, 2014
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Mathias Vaupel, Rainer Steiner, Werner Robl, Jens Pohl, Joern Plagmann, Gottfried Beer
  • Publication number: 20140027915
    Abstract: In various aspects of the disclosure, a semiconductor device including at least one semiconductor die; a dielectric layer adjoining the semiconductor die; geometric structures formed in the dielectric layer; and a conductive layer deposited over the dielectric layer, wherein the conductive layer is at least partially located over the geometric structures.
    Type: Application
    Filed: July 24, 2012
    Publication date: January 30, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Thomas GRILLE, Ursula Hedenig, Joern Plagmann, Helmut Schoenherr, Ralph Muth
  • Publication number: 20130309864
    Abstract: One or more embodiments relate to a method of forming a semiconductor structure, comprising: providing a workpiece; forming a barrier layer over the workpiece; forming a seed layer over the barrier layer; forming an inhibitor layer over the seed layer; removing a portion of said inhibitor layer to expose a portion of the seed layer; and selectively depositing a fill layer on the exposed seed layer.
    Type: Application
    Filed: November 8, 2012
    Publication date: November 21, 2013
    Inventors: Hans-Joachim BARTH, Mathias VAUPEL, Rainer STEINER, Werner ROBL, Jens POHL, Joern PLAGMANN, Gottfried BEER
  • Patent number: 8330274
    Abstract: One or more embodiments relate to a method of forming a semiconductor structure, comprising: providing a workpiece; forming a barrier layer over the workpiece; forming a seed layer over the barrier layer; forming an inhibitor layer over the seed layer; removing a portion of said inhibitor layer to expose a portion of the seed layer; and selectively depositing a fill layer on the exposed seed layer.
    Type: Grant
    Filed: September 29, 2010
    Date of Patent: December 11, 2012
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Gottfried Beer, Joern Plagmann, Jens Pohl, Werner Robl, Rainer Steiner, Mathias Vaupel
  • Publication number: 20120080791
    Abstract: One or more embodiments relate to a method of forming an electronic device, comprising: providing a workpiece; forming a first barrier layer over the workpiece; forming an intermediate conductive layer over the first barrier layer; forming a second barrier layer over the intermediate conductive layer; forming a seed layer over the second barrier layer; removing a portion of the seed layer to leave a remaining portion of the seed layer and to expose a portion of the second barrier layer; and electroplating a fill layer on the remaining portion of the seed layer.
    Type: Application
    Filed: September 30, 2010
    Publication date: April 5, 2012
    Inventors: Hans-Joachim BARTH, Gottfried BEER, Joern PLAGMANN, Jens POHL, Werner ROBL, Rainer STEINER, Mathias VAUPEL
  • Patent number: 8148257
    Abstract: One or more embodiments relate to a method of forming an electronic device, comprising: providing a workpiece; forming a first barrier layer over the workpiece; forming an intermediate conductive layer over the first barrier layer; forming a second barrier layer over the intermediate conductive layer; forming a seed layer over the second barrier layer; removing a portion of the seed layer to leave a remaining portion of the seed layer and to expose a portion of the second barrier layer; and electroplating a fill layer on the remaining portion of the seed layer.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: April 3, 2012
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Barth, Gottfried Beer, Joern Plagmann, Jens Pohl, Werner Robl, Rainer Steiner, Mathias Vaupel
  • Publication number: 20120074574
    Abstract: One or more embodiments relate to a method of forming a semiconductor structure, comprising: providing a workpiece; forming a barrier layer over the workpiece; forming a seed layer over the barrier layer; forming an inhibitor layer over the seed layer; removing a portion of said inhibitor layer to expose a portion of the seed layer; and selectively depositing a fill layer on the exposed seed layer.
    Type: Application
    Filed: September 29, 2010
    Publication date: March 29, 2012
    Inventors: Hans-Joachim BARTH, Gottfried BEER, Joern PLAGMANN, Jens POHL, Werner ROBL, Rainer STEINER, Mathias VAUPEL
  • Patent number: 7851362
    Abstract: In order to reduce an unevenness of a surface of a body, a sacrificial layer is applied to the surface, a chemical-mechanical polishing of the sacrificial layer and material of said body is performed to reduce the unevenness of the surface, and a remainder of the sacrificial layer, if any, may be removed.
    Type: Grant
    Filed: February 11, 2008
    Date of Patent: December 14, 2010
    Assignee: Infineon Technologies AG
    Inventors: Joern Plagmann, Holger Poehle
  • Publication number: 20090203220
    Abstract: In order to reduce an unevenness of a surface of a body, a sacrificial layer is applied to the surface, a chemical-mechanical polishing of the sacrificial layer and material of said body is performed to reduce the unevenness of the surface, and a remainder of the sacrificial layer, if any, may be removed.
    Type: Application
    Filed: February 11, 2008
    Publication date: August 13, 2009
    Inventors: Joern Plagmann, Holger Poehle