Patents by Inventor Jo-Ey Wong
Jo-Ey Wong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20180033565Abstract: Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.Type: ApplicationFiled: July 28, 2017Publication date: February 1, 2018Inventors: Padraig Fitzgerald, Jo-ey Wong, Raymond C. Goggin, Bernard Patrick Stenson, Paul Lambkin, Mark Schirmer
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Patent number: 9748048Abstract: Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.Type: GrantFiled: April 25, 2014Date of Patent: August 29, 2017Assignee: Analog Devices GlobalInventors: Padraig L. Fitzgerald, Jo-ey Wong, Raymond C. Goggin, Bernard P. Stenson, Paul Lambkin, Mark Schirmer
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Patent number: 9583294Abstract: A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base.Type: GrantFiled: May 15, 2014Date of Patent: February 28, 2017Assignee: Analog Devices GlobalInventors: Check F. Lee, Raymond C. Goggin, Padraig L. Fitzgerald, Bernard P. Stenson, Mark Schirmer, Jo-ey Wong
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Patent number: 9230751Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.Type: GrantFiled: January 8, 2014Date of Patent: January 5, 2016Assignee: ANALOG DEVICES, INC.Inventors: Denis Ellis, Padraig Fitzgerald, Jo-ey Wong, Raymond Goggin, Richard Tarik Eckl
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Publication number: 20150311003Abstract: Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.Type: ApplicationFiled: April 25, 2014Publication date: October 29, 2015Inventors: Padraig L. Fitzgerald, Jo-ey Wong, Raymond C. Goggin, Bernard P. Stenson, Paul Lambkin, Mark Schirmer
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Publication number: 20150311021Abstract: A MEMS switch has a base formed from a substrate with a top surface and an insulator layer formed on at least a portion of the top surface. Bonding material secures a cap to the base to form an interior chamber. The cap effectively forms an exterior region of the base that is exterior to the interior chamber. The MEMS switch also has a movable member (in the interior chamber) having a member contact portion, an internal contact (also in the interior chamber), and an exterior contact at the exterior region of the base. The contact portion of the movable member is configured to alternatively contact the interior contact. A conductor at least partially within the insulator layer electrically connects the interior contact and the exterior contact. The conductor is spaced from and electrically isolated from the bonding material securing the cap to the base.Type: ApplicationFiled: May 15, 2014Publication date: October 29, 2015Inventors: Check F. Lee, Raymond C. Goggin, Padraig L. Fitzgerald, Bernard P. Stenson, Mark Schirmer, Jo-ey Wong
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Publication number: 20140115873Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.Type: ApplicationFiled: January 8, 2014Publication date: May 1, 2014Applicant: Analog Devices, Inc.Inventors: Denis ELLIS, Padraig FITZGERALD, Jo-ey WONG, Raymond GOGGIN, Richard Tarik ECKL
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Patent number: 8659373Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.Type: GrantFiled: October 9, 2012Date of Patent: February 25, 2014Assignee: Analog Devices, Inc.Inventors: Denis Ellis, Padraig Fitzgerald, Jo-ey Wong, Raymond Goggin, Richard Tarik Eckl
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Patent number: 8294539Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.Type: GrantFiled: December 18, 2008Date of Patent: October 23, 2012Assignee: Analog Devices, Inc.Inventors: Denis Ellis, Padraig Fitzgerald, Jo-ey Wong, Raymond Goggin, Richard Tarik Eckl
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Patent number: 8124436Abstract: A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.Type: GrantFiled: May 27, 2011Date of Patent: February 28, 2012Assignee: Analog Devices, Inc.Inventors: Mark Schirmer, Raymond Goggin, Padraig Fitzgerald, David Rohan, Jo-ey Wong
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Publication number: 20110287586Abstract: A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.Type: ApplicationFiled: May 27, 2011Publication date: November 24, 2011Applicant: ANALOG DEVICES, INC.Inventors: Mark Schirmer, Raymond Goggin, Padraig Fitzgerald, David Rohan, Jo-ey Wong
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Patent number: 7968364Abstract: A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.Type: GrantFiled: August 20, 2009Date of Patent: June 28, 2011Assignee: Analog Devices, Inc.Inventors: Mark Schirmer, John Dixon, Raymond Goggin, Padraig Fitzgerald, David Rohan, Jo-ey Wong
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Publication number: 20100155202Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.Type: ApplicationFiled: December 18, 2008Publication date: June 24, 2010Applicant: Analog Devices, Inc.Inventors: Denis ELLIS, Padraig FITZGERALD, Jo-ey WONG, Raymond GOGGIN, Richard Tarik Gereon ECKL
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Publication number: 20100068854Abstract: A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.Type: ApplicationFiled: August 20, 2009Publication date: March 18, 2010Applicant: ANALOG DEVICES, INC.Inventors: Mark Schirmer, John Dixon, Raymond Goggin, Padraig Fitzgerald, David Rohan, Jo-ey Wong
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Patent number: 6707593Abstract: An electrostatically operated microelectromechanical system comprises a movable and a stationary structure, with a discharge system that is activated upon pull-in of the movable structure to discharge the voltage across an electrostatic cavity to thereby prevent stiction adhesion of the movable structure to the stationary structure. Specifically, a membrane release structure comprises a mirror optical element. The membrane is separated from a stationary support by an electrostatic cavity. The discharge switch comprises a membrane conductor pad on the membrane and a support conductor pad on the support that conducts a current upon activation of the discharge switch to discharge the electrostatic voltage. Preferably, these pads are metal.Type: GrantFiled: May 8, 2001Date of Patent: March 16, 2004Assignee: Axsun Technologies, Inc.Inventors: Minh Van Le, Jo-Ey Wong
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Publication number: 20020167713Abstract: An electrostatically operated microelectromechanical system comprises a movable and a stationary structure, with a discharge system that is activated upon pull-in of the movable structure to discharge the voltage across an electrostatic cavity to thereby prevent stiction adhesion of the movable structure to the stationary structure. Specifically, a membrane release structure comprises a mirror optical element. The membrane is separated from a stationary support by an electrostatic cavity. The discharge switch comprises a membrane conductor pad on the membrane and a support conductor pad on the support that conducts a current upon activation of the discharge switch to discharge the electrostatic voltage. Preferably, these pads are metal.Type: ApplicationFiled: May 8, 2001Publication date: November 14, 2002Applicant: AXSUN Technologies, Inc.Inventors: Minh Van Le, Jo-Ey Wong
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Publication number: 20020106871Abstract: A process for singulating MOEMS optical devices from a precursor structure, in which the precursor structure comprises device material, having movable optical structures, and handle material, through which optical ports are formed to provide for optical access to the movable optical structures. The process comprises coating a frontside and a backside of the precursor structure with protection material. The precursor structure is then attached to a substrate such as dicing tape and the precursor structure separated into individual optical devices by a process, including die sawing. Thereafter, the optical devices are removed from the tape and the protection material removed from the optical devices.Type: ApplicationFiled: January 30, 2001Publication date: August 8, 2002Inventors: Minh Van Le, Jo-Ey Wong
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Patent number: 6420206Abstract: A process for singulating MOEMS optical devices from a precursor structure, in which the precursor structure comprises device material, having movable optical structures, and handle material, through which optical ports are formed to provide for optical access to the movable optical structures. The process comprises coating a frontside and a backside of the precursor structure with protection material. The precursor structure is then attached to a substrate such as dicing tape and the precursor structure separated into individual optical devices by a process, including die sawing. Thereafter, the optical devices are removed from the tape and the protection material removed from the optical devices.Type: GrantFiled: January 30, 2001Date of Patent: July 16, 2002Assignee: Axsun Technologies, Inc.Inventors: Minh Van Le, Jo-Ey Wong