Abstract: An electrostatic actuation method for micro-electromechanical systems, comprising: providing a first electrode (10) integral to a movable part (100) of the micro-electromechanical system, and providing at least a second electrode (20, 20?) also integral to the same movable part (100) of the micro-electromechanical system, there being a gap (40) between said first and second electrodes, where said first and second electrodes are electrically isolated from each other using an electrically non-conductive material (30), inducing a charge in the electrodes which generates a force between the electrodes, said force acting between the electrodes causing the deformation of the movable part of the micro-electromechanical system. The invention also relates to an electrostatic actuator with integral electrodes for micro-electromechanical systems.

Abstract: Integrated circuit obtained by a CMOS process and comprising circuit components and at least one micro-electromechanical switch comprising a layered structure, comprising an actuator electrode corresponding to a first conductive layer, at least one contact electrode corresponding to a second conductive layer, and a displaceable conductive element corresponding to a third conductive layer. The invention also relates to a method of manufacturing an integrated circuit including said switch, and to a circuit incorporating the switch.