Abstract: A hybrid coil (11) employs a wire layer (22), a wire layer (23) adjacent the wire layer (22), and a wire layer (24) adjacent the wire layer (23). The hybrid coil (11) further employs a thermal conductive insulator (42) physically disposed within a space between the wire layer (22) and the wire layer (23), and a thermal conductive insulator (43) physically disposed within a space between the wire layer (23) and the wire layer (24). The thermal conductive insulators (42, 43) can be electrically disconnected, and each thermal conductive insulator (42, 43) can consists of an aluminum foil (42a, 43a) having oxide layers (42b, 43b, 42c, 43c) on each side thereof.

Abstract: A positioning device comprising a first part (1) which is movable relatively to a second part (2) in an X-direction and a Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged according to a pattern of rows (7) and columns (8) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row (7) and each column (8) rotates 90° counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45°, and the other type having an offset of ?45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.

Abstract: A lithographic apparatus has a positioning system for positioning an object table. The positioning system includes a planar motor having a stator and a translator, one comprising a periodic magnet structure and the other comprising a plurality of coils. The phase relationship between the stator and translator is determined by energizing at least some of the coils with an oscillating signal sufficient to cause vibrations of the translator, measuring the vibrations, and determining the phase relationship between the translator and stator on the basis of the measured vibrations. Alternatively, the relationship between stator and translator may be determined by detecting distinct optical marks on the periodic magnet array.

Abstract: A positioning device comprising a first part (1) which is movable relatively to a second part (2) in an X-direction and a Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged according to a pattern of rows (7) and columns (8) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row (7) and each column (8) rotates 90° counterclockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45°, and the other type having an offset of −45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.

Abstract: A positioning device comprising a first part (1) which is movable relatively to a second part (2) in an X-direction and a Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged according to a pattern of rows (7) and columns (8) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row (7) and each column (8) rotates 90° counter-clockwise. The second part (2) comprises an electric coil system (4) with two types of electric coils (C1, C2), one type having an angular offset of +45°, and the other type having an offset of −45° with respect to the X-direction. The magnet configuration causes a very strong magnetic field.

Abstract: A motion damper (1) with a first part (3) and a second part (5) which are mutually displaceable parallel to a damping direction (X). The first part (3) including a permanent magnet system (35), and the second part (5) including an electric actuator coil (25) which is positioned in the magnetic field of the magnet system (35). According to the invention, the motion damper (1) including an electrical amplifier (53) for amplifying an electric current generated in the actuator coil (25) under the influence of a movement of the actuator coil (25) in the magnetic field of the magnet system (35). Since the electric current is amplified, the interaction between the electric current and the magnetic field of the magnet system (35) provides a sufficient electromagnetic damping force with a substantially ideal linear damping characteristic.

Abstract: A motor with reduced radial forces includes a first motor part made up of 2P permanent magnet poles surrounding a second motor part formed by a magnetic yoke having a number T of pole teeth and with an air gap between the first and second motor parts. The first and second motor parts are moveable relative to one another. Exciter coils are mounted on the pole teeth and the pole teeth are separated by pole gaps. For a motor with a number 2P magnet poles and a number T of pole teeth which do not have a common submultiple greater than 1, each of the pole teeth have a centrally located auxiliary slot facing the air gap thereby to reduce undesirable radial forces.

Abstract: An electromagnetic actuator (1) comprises two actuator sections which are translatable relative to one another along an actuator axis (1a) and which are rotatable about the actuator axis, a first actuator section (1) comprising a coil system and a second actuator section (3) comprising a permanent magnet system for cooperation with the coil system via an air gap. The coil system is arranged on a magnetically conductive yoke (5) and comprises a cylindrical translation coil (9) and a toroidal rotation coil (7), which are coaxial with the actuator axis. The permanent magnet system comprises an annular magnet (11), which is coaxial with the actuator axis, for cooperation with both the translation coil and the rotation coil. The magnet has a radial magnetisation (B) which is interrupted by an annular segment (13). The magnetically conductive yoke has a central core (5b) around which the translation coil is arranged and a shell (5a) on which the rotation coil is disposed.

Abstract: A reluctance motor comprises a stator (S) provided with coils (W1, W2), and a rotor (R). The rotor R has pairs of positions of stable equilibrium and pairs of positions of unstable equilibrium. The reluctance motor is started by first bringing the rotor into a first position of stable equilibrium (.theta.=-.theta.ms) by means of a first energizing current and subsequently rotating it towards a second (.theta.=0) of stable equilibrium by means of a second energizing current.

Abstract: A single-phase reluctance motor in which the excitation pulse timings and lengths are controlled as a function of the speed by means of, in particular, a microprocessor; mechanical provisions are made in order to ensure reliable starting of the motor and special starting pulses are generated by means of a simple motor-position sensor which generates two pulses per revolution.