Patents by Inventor Johan Frederick Dijksman

Johan Frederick Dijksman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • IMPRINT LITHOGRAPHY
    Publication number: 20120153538
    Abstract: A chuck apparatus for holding a substrate is the disclosed. The chuck apparatus includes a first surface portion on which the substrate is to be held and a second surface portion adjacent to the first surface portion and extending at least partially around an edge of the first surface portion and which, in use, is arranged to deflect gas over the first surface portion and thus the substrate that is to be held on the first surface portion.
    Type: Application
    Filed: February 22, 2012
    Publication date: June 21, 2012
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Johan Frederick Dijksman, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman, Ivar SCHRAM, Jeroen Herman Lammers, Richard Joseph Marinus Schroeders