Abstract: The invention relates to a method for producing a thin film solar cell module and thin film solar cell module thus produces. The method comprises the steps of forming a multi-layer structure (100) of multiple electrically interconnected thin film solar cells (1) on a substrate (2), the multi-layer structure comprising a back contact layer (10), a photovoltaic active layer (11), and a front contact layer (13); and forming a conductive grid (3) underneath or onto the front contact layer by depositing a conductive material through a mask (4) before or after forming the front contact layer (13), by moving the substrate (2) and the mask (4) with respect to a deposition source (5) of the conductive material.

Abstract: The invention relates to a method for producing a thin film solar cell module and thin film solar cell module thus produces. The method comprises the steps of forming a multi-layer structure (100) of multiple electrically interconnected thin film solar cells (1) on a substrate (2), the multi-layer structure comprising a back contact layer (10), a photovoltaic active layer (11), and a front contact layer (13); and forming a conductive grid (3) underneath or onto the front contact layer by depositing a conductive material through a mask (4) before or after forming the front contact layer (13), by moving the substrate (2) and the mask (4) with respect to a deposition source (5) of the conductive material.

Abstract: The invention relates to a vacuum deposition source heating system and to a vacuum deposition system having such a heating system. The vacuum deposition source heating system is mountable to a vacuum deposition system and comprises: a heating element (1) designed for heating a deposition source, a power supply element (2), electrically connected to the heating element for providing electrical power to the heating element (1); a connection member (3), electrically connecting the power supply element (2) to the heating element, whereby the power supply element is mechanically mounted to the connection member (3) in an elastic manner, and whereby the connection member comprises a spring element (31) made of an elastic carbon material.

Abstract: The invention refers to a deposition apparatus comprising a crucible (1) and heating means (2) arranged for heating evaporation material (3) inside the crucible (1), whereby the crucible (1) comprises a metallic body (11) and a protection layer (13) comprising titanium oxide (TixOy), which is covering at least a part of the inside surface (12) of the metallic body (11). Furthermore, the invention refers to a method for producing a crucible for such a deposition apparatus.