Patents by Inventor Johan Siegers

Johan Siegers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for using short ranged wireless enabled computers as a service tool
    Patent number: 7085623
    Abstract: A handheld device for use in a wireless environment to operate an apparatus is provided. The handheld device sends a request to an apparatus controller to initiate a maintenance sequence. The handheld device receives information from the apparatus controller to control the operation of the maintenance sequence. The handheld device sends a maintenance command to the apparatus controller. The handheld device then receives information regarding the state of the apparatus after the maintenance command is executed.
    Type: Grant
    Filed: August 15, 2002
    Date of Patent: August 1, 2006
    Assignee: ASM International NV
    Inventor: Johan Siegers
  • System and method for fingerprinting of semiconductor processing tools
    Patent number: 6889149
    Abstract: A system and method is used for measuring the performance of semiconductor processing tools. A software component may be used to define a set of performance variables and associate performance limits. From the set of performance variables, a set of variables may be selected to create a customized test for a particular tool. The system may be used to store the results of the tests within the system for fast comparison with the associated performance limits, with previous test results, or both. The system may be used to display an overall status of groups of performance variables.
    Type: Grant
    Filed: April 25, 2003
    Date of Patent: May 3, 2005
    Assignee: ASM International N.V.
    Inventors: Johan Siegers, Kornelius Haanstra, Jan Zinger
  • System and method for fingerprinting of semiconductor processing tools
    Publication number: 20040215410
    Abstract: A system and method is used for measuring the performance of semiconductor processing tools. A software component may be used to define a set of performance variables and associate performance limits. From the set of performance variables, a set of variables may be selected to create a customized test for a particular tool. The system may be used to store the results of the tests within the system for fast comparison with the associated performance limits, with previous test results, or both. The system may be used to display an overall status of groups of performance variables.
    Type: Application
    Filed: April 25, 2003
    Publication date: October 28, 2004
    Inventors: Johan Siegers, Kornelius Haanstra, Jan Zinger
  • Method and system for using short ranged wireless enabled computers as a service tool
    Publication number: 20040034448
    Abstract: A handheld device for use in a wireless environment to operate an apparatus is provided. The handheld device sends a request to an apparatus controller to initiate a maintenance sequence. The handheld device receives information from the apparatus controller to control the operation of the maintenance sequence. The handheld device sends a maintenance command to the apparatus controller. The handheld device then receives information regarding the state of the apparatus after the maintenance command is executed.
    Type: Application
    Filed: August 15, 2002
    Publication date: February 19, 2004
    Applicant: ASM International NV
    Inventor: Johan Siegers