Patents by Inventor Johanes F. N. Swenberg

Johanes F. N. Swenberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR IMPROVING FILM DEPOSITION UNIFORMITY ON A SUBSTRATE
    Publication number: 20020020358
    Abstract: A method and apparatus for depositing a film on a substrate. According to the present invention a prewafer reaction layer is deposited onto a susceptor placed in the reaction chamber to form a prewafer reaction layer coated susceptor prior to film deposition. A deposition gas is then fed into the reaction chamber so that it flows over the prewafer reaction layer coated susceptor and the substrate to form a film on the prewafer reaction layer coated susceptor and the substrate.
    Type: Application
    Filed: November 11, 1999
    Publication date: February 21, 2002
    Inventors: H. PETER W. HEY, VEDAPURAM S. ACHUTHARAMAN, JOHANES F. N. SWENBERG
  • Method and apparatus for improving film deposition uniformity on a substrate
    Patent number: 6022587
    Abstract: A method and apparatus for depositing a film on a substrate. According to the present invention a prewafer reaction layer is deposited onto a susceptor placed in the reaction chamber to form a prewafer reaction layer coated susceptor prior to film deposition. A deposition gas is then fed into the reaction chamber so that it flows over the prewafer reaction layer coated susceptor and the substrate to form a film on the prewafer reaction layer coated susceptor and the substrate.
    Type: Grant
    Filed: May 13, 1997
    Date of Patent: February 8, 2000
    Assignee: Applied Materials, Inc.
    Inventors: H. Peter W. Hey, Vedapuram S. Achutharaman, Johanes F. N. Swenberg