Patents by Inventor Johann Ninaus

Johann Ninaus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etch apparatus and method of etching silicon nitride
    Patent number: 8282766
    Abstract: An etch apparatus, especially for silicon nitride etch includes a control unit coupled to at least one component of the group of components comprising heater current sensors, a pump transducer sensor and a flow sensor provided for a diluting liquid. A malfunction of the apparatus is avoided and the etching process can be controlled for better performance.
    Type: Grant
    Filed: November 19, 2008
    Date of Patent: October 9, 2012
    Assignee: Austriamicrosystems AG
    Inventors: Gerhard Eilmsteiner, Johann Ninaus
  • Etch Apparatus and Method of Etching Silicon Nitride
    Publication number: 20100124824
    Abstract: An etch apparatus, especially for silicon nitride etch includes a control unit coupled to at least one component of the group of components comprising heater current sensors, a pump transducer sensor and a flow sensor provided for a diluting liquid. A malfunction of the apparatus is avoided and the etching process can be controlled for better performance.
    Type: Application
    Filed: November 19, 2008
    Publication date: May 20, 2010
    Applicant: austriamicrosystems AG
    Inventors: Gerhard EILMSTEINER, Johann NINAUS